Stacked Structure Burr Reduction via Segmented Cutting
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Solution Overview
Problem
The existing MEMS package structure manufacturing process faces challenges with long or large burrs on the LCP and SUS layers, leading to increased package volume, risk of short circuits, and damage during the pick-and-place process due to material property differences and high toughness.
Innovation Solution
A stacked structure with a polymer layer and a metal layer is formed using a multi-layered structure, where a V-shaped blade and standard blade cutting method reduces burr lengths to 0.8 μm to 150 μm and 0.8 μm to 7 μm respectively, creating an indentation structure and minimizing footprint and short circuit risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional cutting methods are used on multi-layered structures, then the manufacturing process is simple, but long or large burrs are generated on the polymer and metal layers
Solution Approach 1:
The cutting process is divided into multiple sequential steps: first cutting through the metal layer, then cutting through the polymer layer. This segmentation allows each cutting operation to be optimized for its specific material, reducing burr generation on both layers while maintaining process feasibility
Solution Approach 2:
The metal layer is cut first before the polymer layer. This preliminary action on the metal layer prepares the structure for subsequent polymer cutting, allowing the polymer cut to start from an already-separated metal edge, which reduces the overall burr length on the polymer layer
2Manufacturing precision
If conventional cutting methods are used, then the manufacturing process is fast, but the package footprint increases due to long burrs
Solution Approach 1:
By segmenting the cutting process into separate operations for metal and polymer layers, each cut can be optimized to minimize burr length. This reduces the overall footprint of the packaged device while maintaining efficient manufacturing through standardized cutting procedures
Solution Approach 2:
The cutting parameters (such as blade type, cutting speed, and depth) are changed between the metal layer cutting and polymer layer cutting steps. This allows optimization of cutting parameters for each material's specific properties, reducing burr length while maintaining high cutting efficiency
3Manufacturing precision
If conventional cutting methods are used, then the cutting process is simple, but the risk of short circuits increases due to large burrs
Solution Approach 1:
The cutting process is segmented into distinct steps for metal and polymer layers, with each step optimized to minimize burr generation. This reduces the risk of short circuits caused by large burrs while maintaining process simplicity through standardized sequential operations
Solution Approach 2:
The first adhesive layer serves as an intermediary between the metal layer and polymer layer. By cutting the metal layer first, this intermediary structure helps isolate the cutting zones, allowing subsequent polymer cutting to produce smaller burrs that pose less short circuit risk
4Manufacturing precision
If conventional cutting methods are used, then the manufacturing process is simple, but damage occurs during pick-and-place process
Solution Approach 1:
The cutting process is divided into sequential steps that first separate the metal layer and then the polymer layer. This segmentation produces smaller burrs on both layers, reducing mechanical damage during the pick-and-place process while maintaining manufacturing simplicity through standardized operations
Data Source
AI summary
A stacked structure includes a polymer layer and a metal layer. The metal layer is disposed on the polymer layer. A burr length on a surface of the polymer layer is about 0.8 μm to about 150 μm, and a burr length on a surface of the metal layer is about 0.8 μm to about 7 μm.