Stacked Wafer Cassette Assembly for Small-Lot Separation
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Solution Overview
Problem
Conventional cassette assemblies for storing semiconductor wafers are inefficient in space utilization and reduce productivity when handling small-lot multikind wafers, as they require multiple cassettes for different wafer types, leading to unnecessary location occupation and reduced processing efficiency.
Innovation Solution
A cassette assembly is designed by stacking and fixing multiple cassettes using various fixing means such as catch members, screws, and connecting brackets, allowing for efficient combination and disassembly to accommodate different wafer types, thereby optimizing space and improving productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple separate cassettes are used to store different kinds of wafers, then each wafer type can be stored separately, but the productivity is reduced and location area is unnecessarily occupied
Solution Approach 1:
The patent combines multiple separate cassettes into a single integrated cassette structure with separate storage compartments for different wafer types. This merging approach maintains the ability to store different wafer kinds separately while reducing the number of individual cassette units that need to be handled, transported, and managed, thereby improving productivity and reducing location occupation without sacrificing adaptability.
2Quantity of substance
If a conventional cassette stores about 25 wafer units, then the capacity is sufficient for large batches, but space is wasted when storing small-lot multikind wafers
Solution Approach 1:
The cassette is divided into multiple separate storage compartments, each capable of holding a limited number of wafer units. This segmentation allows the system to efficiently store small lots of different wafer types by utilizing only the necessary compartments, thereby improving space utilization while maintaining the overall storage capacity when all compartments are used together.
3Adaptability or versatility
If multiple cassettes are separately carried to each processing step, then different wafer types can be processed according to their specific requirements, but the productivity is reduced
Solution Approach 1:
The patent merges multiple wafer-type-specific cassettes into a single integrated unit that contains separate compartments for different wafer kinds. This allows the entire assembly to be carried and transferred as one unit to different processing steps, reducing the time and effort required for handling multiple separate cassettes while maintaining the ability to process different wafer types according to their specific requirements.
Data Source
AI summary
A cassette assembly for storing a plurality of platelike workpieces. The cassette assembly includes a first cassette, a second cassette stacked on the first cassette, and a fixing unit for fixing the first cassette and the second cassette to each other in the stacked condition. Both of the cassettes include a first side plate having workpiece supporting grooves, and a second side plate arranged parallel to the first side plate. The second side plate has workpiece supporting grooves respectively opposed to the workpiece supporting grooves of the first side plate, a top plate for connecting the upper ends of the first and second side plates, a bottom plate for connecting the lower ends of the first and second side plates, and a load/unload opening formed near the front ends of the first and second side plates, the top plate, and the bottom plate for loading and unloading the workpieces.