3D Stacked Waveguide Layout for Dense Photonic Neural Networks

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Solution Overview

Problem

Conventional methods for implementing photonic neural networks (PNNs) are inefficient, expensive, and limited in computation density due to the need for feedback loops or multi-layer networks on a single photonic layer, which are power hungry and not optimally utilized.

Innovation Solution

A method for forming photonic devices with vertically stacked waveguide layers, enabling optical power exchange between different photonic layers, allowing for a 3D PNN structure that reduces chip size, fabrication cost, and enhances computation density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional feedback loops or multi-layer networks on a single photonic layer are used to implement PNNs, then photonic processing functionality is achieved, but computation density is limited and power consumption increases

Engineering Contradiction:
Improvecomputation densityVSAvoidpower consumption
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The patent transitions from 2D planar photonic networks to 3D vertically stacked waveguide layers. Multiple photonic layers are stacked in the vertical dimension, enabling direct optical coupling between layers through vertical waveguide connections. This dimensional change allows for higher computation density by packing more processing elements in the vertical direction while reducing the need for power-hungry feedback loops required in conventional 2D architectures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If conventional PNN implementation methods are used, then photonic processing is achieved, but chip size becomes large and fabrication cost increases

Engineering Contradiction:
Improvechip sizeVSAvoidfabrication cost
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

By stacking multiple photonic layers vertically, the patent achieves higher computation density within a smaller horizontal footprint. The vertical stacking allows more processing elements to be packed into a compact chip area, reducing overall chip size while the standardized layer structure simplifies the fabrication process and reduces manufacturing costs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The photonic neural network is segmented into multiple discrete photonic layers, each containing specific processing functions. These layers are independently fabricated and then vertically integrated, allowing for modular design and simplified manufacturing. Each layer can be optimized independently while maintaining overall system functionality, reducing fabrication complexity and cost.

Inventive Principle:
Principle #1Segmentation

3Productivity

If vertically stacked waveguide layers are implemented, then computation density and power exchange capabilities are enhanced, but device structure becomes more complex

Engineering Contradiction:
Improvecomputation densityVSAvoiddevice structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent manages structural complexity by organizing waveguides in a regular vertical stacking pattern with consistent layer间距 (spacing). The vertical arrangement creates a more ordered and predictable structure compared to complex 2D routing, making the device easier to fabricate and characterize despite the increased number of layers. The regularity in vertical stacking reduces manufacturing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The vertical stacking of waveguides in photonic devices improves computation density and reduces fabrication costs while providing higher fabrication tolerance and enhanced power exchange capabilities.

Implementation Method 1

a first waveguide in the insulator layer and a second waveguide in the insulator layer

Methodology Applied
Scientific EffectOptical waveguide: Waveguide (optics)

Data Source

PatentUS20250355164A1Photonic device, system and method of making same
Publication Date: 2025.11.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250355164A1 patent drawing
  • US20250355164A1 patent drawing
  • US20250355164A1 patent drawing

AI summary

A method for forming a photonic device includes forming a layout pattern over a substrate. The method includes depositing a first waveguide layer over the layout pattern. The method includes patterning the first waveguide layer to define a first plurality of waveguide patterns. The method includes depositing a second waveguide layer over the first plurality of waveguide patterns. The method includes patterning the second waveguide layer to define a second plurality of waveguide patterns, wherein a first waveguide pattern of the first plurality of waveguide patterns is optically connected to a second waveguide pattern of the second plurality of waveguide patterns. The method further includes removing the substrate. The method includes depositing a third waveguide layer, wherein the layout pattern is between the first plurality of waveguide patterns and the third waveguide layer. The method includes patterning the third waveguide layer to define a third plurality of waveguide patterns.