Semiconductor Stacker Arm Layout for Compact Wafer Pod Handling
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Solution Overview
Problem
Semiconductor warehouses face challenges with insufficient space utilization and high requirements for handling tasks due to the limited space and large storage needs, necessitating an optimized mechanical structure and operation mode for robotic arms.
Innovation Solution
A robotic arm with a compact driving layout is designed, featuring a first and second driving arm with independent power sources, allowing synchronized rotation and extension/retraction of an access plate through a set angle relationship, and equipped with detection sensors and an RFID reader for precise positioning and information reading.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the robotic arm uses a conventional driving layout, then the structure is simple, but the space utilization is insufficient and the height/size requirements are not met
Solution Approach 1:
The patent implements nesting by placing the driven linkage mechanism inside the second driving arm, and the second active driving mechanism inside the first driving arm. This nested arrangement allows the robotic arm to achieve compact dimensions and high space utilization while maintaining the necessary mechanical functions, directly resolving the contradiction between volume efficiency and structural complexity.
Solution Approach 2:
The patent transitions from linear/external arrangement of driving mechanisms to a multi-dimensional nested configuration. By organizing components in three-dimensional space with overlapping volumes, the system achieves compact footprint and meets height/size requirements without proportionally increasing structural complexity.
2Volume of moving object
If the robotic arm reduces height and size, then space utilization improves, but positioning accuracy may deteriorate
Solution Approach 1:
The patent incorporates detection sensors that provide feedback on the position and state of the access plate and driving arms. This feedback mechanism enables precise control and positioning even within a compact structure, resolving the contradiction between reduced size and maintained positioning accuracy through continuous monitoring and adjustment.
Data Source
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AI summary
The present disclosure provides a semiconductor stacker, a robotic arm of the semiconductor stacker, and a method for operating the robotic arm, which relate to the technical field of semiconductor stereoscopic warehouse. The robotic arm includes a robotic arm bottom plate, a driving arm assembly, and an access plate that are sequentially rotatably connected. The driving arm assembly includes a first driving arm and a second driving arm, where the first driving arm is rotatably mounted on the robotic arm bottom plate through a first active driving mechanism. The first driving arm is provided with a second active driving mechanism for driving the second driving arm, and the second driving arm can drive the relative rotation of the access plate through the driven linkage mechanism. The first active driving mechanism is placed outside the first driving arm, and the robotic arm bottom plate and the first active driving mechanism are disposed inside the lifting box. Through the layout of the driving mechanism and the design of the driven linkage mechanism, the compactness of the height and size of the robotic arm can be ensured, and the accessible position is lower. By designing special core-alignment tooling, the convenience of assembly and maintenance of the robotic arm can be improved.