Stage Alignment Drivers With Asymmetric Sliding Blocks Under Load
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Solution Overview
Problem
Existing stage alignment apparatuses face challenges in maintaining alignment precision due to deformation caused by vertical loads, leading to reduced durability and imprecise stage movement.
Innovation Solution
The stage alignment apparatus incorporates alignment drivers with sliding blocks of varying shapes, including bending blocks made of elastic material, to distribute forces and maintain alignment precision under load, featuring a design that allows for perpendicular movement of sliding blocks and a ball screw mechanism to adjust the upper stage position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional alignment drivers with identical sliding blocks are used, then the device structure is simple, but deformation occurs under vertical load reducing alignment precision
Solution Approach 1:
The patent applies asymmetry by designing at least one first sliding block with a shape substantially different from other first sliding blocks. Specifically, one sliding block includes bending blocks with bent shapes while others have different configurations. This asymmetric design allows differential deformation behavior under vertical load, enabling the bending blocks to flex and absorb stress while maintaining alignment precision.
Solution Approach 2:
The patent implements local quality by giving specific sliding blocks (those with bending blocks) different properties from others. The bending blocks are made of elastic material with specific geometric features (bent shapes) localized at critical positions. This localized differentiation allows stress distribution optimization without redesigning the entire alignment driver system.
2Duration of action of stationary object
If rigid sliding blocks are used, then the structure is simple and strong, but deformation under vertical load reduces durability
Solution Approach 1:
The patent changes the physical parameter of the sliding blocks by using elastic material for the bending blocks instead of purely rigid material. This parameter change allows the blocks to deform elastically under vertical load, absorbing stress and preventing permanent deformation. The bent geometric shape further enhances this by providing predetermined flex zones that maintain alignment while accommodating load-induced stresses.
Solution Approach 2:
The bending blocks are designed with pre-formed bent shapes that act as cushioning elements before load is applied. These pre-designed flexible regions anticipate vertical loads and provide compliant deformation paths, preventing sudden failures and extending the operational life of the alignment drivers under repeated loading conditions.
3Strength
If uniform sliding blocks are used in all alignment drivers, then manufacturing is simple, but stress distribution is uneven causing deformation
Solution Approach 1:
The patent applies local quality by making only specific sliding blocks (those requiring stress absorption) have bending blocks with elastic material and bent shapes, while other sliding blocks can remain simpler in design. This localized approach optimizes stress distribution at critical locations without requiring all sliding blocks to be complex, thereby balancing manufacturing ease with structural strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the durability and precision of stage alignment by efficiently distributing mechanical and thermal stresses, ensuring accurate positioning of the upper stage despite vertical loads.
Implementation Method 1
The bending blocks may include an elastic material
Implementation Method 2
a ball screw connecting between the first sliding block and the transfer motor
Data Source
AI summary
A stage alignment apparatus includes a lower stage, alignment drivers disposed on the lower stage, and an upper stage aligned by the alignment drivers. Each of the alignment drivers includes a first sliding block and a second sliding block slidable in directions perpendicular to each other, and a shape of a first sliding block of at least one alignment driver among the alignment drivers is substantially different from a shape of first sliding blocks of other alignment drivers among the alignment drivers.