Stage Apparatus Origin Return Speed Control

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Solution Overview

Problem

Conventional stage apparatuses face challenges in achieving high-speed and high-precision recovery to the origin point position due to the need for low-speed movement to avoid mechanical limits, which increases operational time and complexity, especially when using incremental scales and multiple sensors for position management in microscope systems.

Innovation Solution

A stage apparatus with an incremental scale and multiple sensors that performs a high-speed initial movement followed by a low-speed movement to precisely detect the origin point, utilizing a predetermined distance and sensor intervals to avoid mechanical limits, allowing for efficient origin return and movement operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If the moving body moves at high speed to the origin point position, then the origin return operation time is reduced, but the precision of origin point detection deteriorates

Engineering Contradiction:
Improveorigin return operation timeVSAvoidorigin point detection precision
Core Design Contradiction:
Loss of timeVSMeasurement precision

Solution Approach 1:

The origin return operation is divided into two distinct phases: a first movement phase at high speed to cover most of the distance to the origin point, and a second movement phase at low speed for precise detection near the origin point. This segmentation allows the system to benefit from both high-speed travel and precise positioning.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The movement speed is dynamically adjusted based on the position relative to the origin point. The control unit switches between high speed and low speed modes, optimizing the balance between operation time and detection precision throughout the origin return process.

Inventive Principle:
Principle #15Dynamics

2Length of moving object

If the origin point position is set close to the movement limit position, then the movable range is utilized efficiently, but the risk of mechanical limit contact increases

Engineering Contradiction:
Improvemovable range utilizationVSAvoidmechanical limit contact avoidance
Core Design Contradiction:
Length of moving objectVSReliability

Solution Approach 1:

The control unit calculates a predetermined safe distance from the movement limit position and uses this as a reference for origin point detection. By performing preliminary calculation of the safe operating zone, the system can efficiently utilize the movable range while maintaining a safety margin to avoid mechanical limit contact.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system continuously monitors the position of the moving body relative to the calculated predetermined position and adjusts the origin return operation accordingly. This feedback mechanism ensures that the moving body remains within the safe operational range while maintaining efficient use of the movable range.

Inventive Principle:
Principle #23Feedback

3Volume of moving object

If multiple sensors are used to read the scale, then the scale length can be shortened for downsizing, but the complexity of position information synthesis increases

Engineering Contradiction:
Improveapparatus sizeVSAvoidposition information synthesis complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The control unit extracts position information from multiple sensors and synthesizes it into a unified position reading. By taking out the position synthesis function and implementing it through systematic calculation based on known sensor intervals, the system achieves downsizing with manageable complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The same control unit that manages movement control also performs position information synthesis from multiple sensors. This multi-functionality approach consolidates the system architecture, reducing overall complexity while enabling the use of multiple sensors for compact design.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS10948706B2Stage apparatus, method of controlling stage apparatus, and microscope system
Publication Date: 2021.03.16 CANON KK
  • US10948706B2 patent drawing
  • US10948706B2 patent drawing
  • US10948706B2 patent drawing

AI summary

A stage apparatus comprises an incremental scale fixed to a movable unit and having a predetermined length shorter than a distance the movable unit can move in a first direction, a first and a second sensor that are arranged in the first direction with an interval therebetween shorter than the predetermined length, and a detection unit that detects an origin point position set in a movable range of the movable unit. In an origin return, if the movable unit is at a position at which both the first sensor and the second sensor can read the scale, the apparatus moves the movable unit to the origin point position by a predetermined distance, then moves the movable unit at a lower speed until the origin point position is detected.