Stage Device Beam Orthogonality Control via Yaw Rotation
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Solution Overview
Problem
In stage devices, continuous operation leads to heat generation causing deformation of the beam, resulting in a loss of orthogonality with guide rails, which compromises accurate positioning of members to be processed.
Innovation Solution
A stage device equipped with two linear motors, guide members, and a beam that is orthogonal to the guide members, along with position sensors and origin sensors, and a controller that performs yaw axis rotation control to maintain orthogonality by calculating and applying correction values to adjust the beam's position, ensuring it remains within a predetermined range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If continuous operation is performed, then productivity is improved, but the beam deforms due to heat generation causing loss of orthogonality with guide rails
Solution Approach 1:
The patent applies preliminary action by performing orthogonality correction at startup before continuous operation begins. The controller calculates correction values based on initial position sensor readings and adjusts the beam's orthogonal position in advance, preventing orthogonality loss during subsequent continuous operation despite heat generation from linear motors.
Solution Approach 2:
The patent utilizes parameter changes by dynamically adjusting the beam's position parameters based on temperature-induced deformation. Position sensors detect changes in the beam's position relative to guide rails, and the controller modifies position parameters to compensate for thermal deformation, maintaining orthogonality during continuous operation.
2Manufacturing precision
If the beam is rigidly fixed to maintain orthogonality, then manufacturing precision is improved, but the system cannot compensate for thermal deformation during continuous operation
Solution Approach 1:
The patent applies dynamics by transitioning from a static rigid fixation system to a dynamic adjustment system. The beam's orthogonal position is no longer fixed but can be dynamically corrected during operation. Position sensors continuously monitor the beam's position, and the controller dynamically adjusts the beam's position to compensate for thermal deformation while maintaining orthogonality.
Solution Approach 2:
The patent implements feedback by using position sensors to detect the beam's position relative to guide rails and feeding this information back to the controller. The controller processes the feedback signals and generates correction commands to adjust the beam's position, creating a closed-loop control system that maintains orthogonality despite thermal deformation during continuous operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains the orthogonality of the beam with respect to the guide rails, even after continuous operation, ensuring accurate positioning of members to be processed by compensating for deformation caused by heat generation.
Implementation Method 1
two linear motors that respectively cause two moving bodies 4 and 5 to be movable in one axis direction
Implementation Method 2
The moving body 4 is provided with static pressure bearing pads 12. The static pressure bearing pads 12 are interposed between the guide rail 2 and the moving body 4.
Implementation Method 3
The beam 6 has one end rigidly fixed to the moving body 4 and the other end joined to the moving body 5
Implementation Method 4
the other end joined to the moving body 5 through a plate spring structure 8
Data Source
AI summary
A stage device has guide members (2, 3) for guiding each of two moving bodies (4, 5) in one axis direction on a level block (1) and has a beam (6) laid across the two moving bodies (4, 5) so as to be perpendicular to the guide members (2, 3) and moving together with the moving bodies (4, 5). The two moving bodies (4, 5) are individually moved to rotate the beam (6) relative to a yaw rotation axis perpendicular to the one axis direction.