Integrated Stage Circulation System for Semiconductor Exposure
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Solution Overview
Problem
Temperature fluctuations during semiconductor processing, caused by exposure to illumination beams or evaporative cooling, lead to wafer distortion and reduced image accuracy due to the lack of precise temperature control in existing exposure apparatuses.
Innovation Solution
A stage assembly with an integrated circulation system that circulates a pressurized fluid through a conduit on the stage, allowing for temperature control without external hoses, and includes a movable piston and resilient member to manage fluid flow and maintain a stable center of gravity, along with a vacuum supply and power source for precise positioning and retention of the device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If external hoses and tubes are used to circulate fluid for temperature control, then temperature control capability is improved, but device complexity and susceptibility to external disturbances increase
Solution Approach 1:
The circulation system is merged with the stage assembly by integrating the storage container, piston mechanism, and circulation conduits directly onto the stage. This eliminates the need for external hoses and tubes, reducing system complexity while maintaining temperature control capability. The fluid circulation system becomes a self-contained unit that moves with the stage.
Solution Approach 2:
The piston acts as an intermediary mechanism between the storage container and the circulation conduit. It provides a sealed interface that allows fluid to be pressurized and circulated without requiring external connections, thereby eliminating the need for external hoses while maintaining effective fluid delivery to the circulation conduits.
2Temperature
If external hoses and tubes are used for fluid circulation, then temperature control is achieved, but positioning accuracy deteriorates due to external disturbances
Solution Approach 1:
By merging the circulation system with the stage assembly, the system eliminates external hoses and tubes that could introduce vibrations, thermal gradients, or mechanical disturbances. The integrated design ensures that temperature control components move with the stage, preventing relative motion and associated positioning errors.
3Power
If a movable piston is used to pressurize circulation fluid, then fluid circulation is improved, but center of gravity stability deteriorates
Solution Approach 1:
A counterweight mechanism is integrated into the storage container assembly to compensate for the changing center of gravity caused by piston movement. As the piston moves to pressurize fluid, the counterweight adjusts to maintain overall balance, preventing stage instability and ensuring precise positioning is maintained throughout the circulation cycle.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively stabilizes the temperature of the stage and device, reducing wafer distortion and enhancing image accuracy by maintaining precise positioning and eliminating external disturbances from hoses and wires, thus improving the manufacturing process.
Implementation Method 1
a resilient member that urges the movable piston to move to reduce the supply volume of the supply chamber and urge the circulation fluid out of the supply chamber
Implementation Method 2
The circulation system can be used to control the temperature of the stage and/or the device without external hoses/tubes that extend off of the stage to an off-board circulation system
Data Source
AI summary
A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).