Stage Device Magnetic Levitation Positioning Speed Leakage
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Solution Overview
Problem
Conventional stage devices used in semiconductor manufacturing and inspection face challenges in increasing positioning speed and acceleration while minimizing magnetic field leakage, which affects the accuracy of electron beams in charged particle beam apparatuses.
Innovation Solution
A stage device with a support stage that magnetically levitates and is positioned using a floating mechanism, combined with a movement stage that applies propulsion through a propulsion-applying unit contacting a propulsion-receiving unit, allowing for high-speed and high-acceleration movement while reducing magnetic field leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the Z device stage mover is enlarged to increase positioning speed and acceleration, then the positioning performance is improved, but the magnetic field leakage increases
Solution Approach 1:
The stage positioning system is divided into two independent subsystems: a movement stage for coarse positioning that provides high speed and acceleration, and a support stage with floating mechanism for fine positioning that maintains positioning precision. This segmentation allows each subsystem to be optimized for its specific function without compromising the other.
Solution Approach 2:
The floating mechanism acts as an intermediary between the movement stage and the support stage. It magnetically levitates the support stage, providing smooth transition and precise control during the handover from coarse to fine positioning, thereby enabling high-speed movement without magnetic field leakage issues.
2Speed
If the Z device stage mover is enlarged to increase acceleration, then the positioning performance is improved, but the device size increases
Solution Approach 1:
The positioning system is segmented into movement stage and support stage with distinct functional responsibilities. The movement stage handles high-acceleration coarse positioning with compact design, while the support stage handles fine positioning. This allows high acceleration to be achieved without proportionally increasing the size of the entire device.
Solution Approach 2:
The floating mechanism uses magnetic levitation to replace traditional mechanical contact-based positioning. This substitution eliminates the need for large mechanical structures and complex drive mechanisms, achieving high acceleration with a more compact device configuration.
3Speed
If conventional magnetic positioning is used to increase positioning speed, then the positioning performance is improved, but magnetic field leakage occurs causing electron beam distortion
Solution Approach 1:
The positioning system separates coarse and fine positioning functions into different stages. The movement stage provides high-speed coarse positioning without requiring magnetic field precision, while the support stage with floating mechanism provides precise fine positioning with minimal magnetic field interference, ensuring electron beam accuracy.
Solution Approach 2:
The floating mechanism serves as an intermediary that transitions the support stage from contact with the movement stage to magnetic levitation. This intermediary function allows the system to achieve high positioning speed while the floating mechanism's magnetic field is confined and does not interfere with the electron beam, maintaining manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables increased positioning speed and acceleration while suppressing magnetic field leakage, improving the accuracy and reducing the size and cost of the device, and is suitable for vacuum environments.
Implementation Method 1
a floating mechanism that magnetically levitates and positions the support stage
Implementation Method 2
When the movement stage moves in the movement direction and the propulsion-applying unit contacts or approaches the propulsion-receiving unit, the propulsion-applying unit applies propulsion in the movement direction to the propulsion-receiving unit
Data Source
AI summary
The problem addressed by the present disclosure is to provide a stage device, a charged particle beam device, and a vacuum device, with which it is possible to increase the speed and the acceleration of positioning and to suppress the leakage of a magnetic field. As a means to resolve this problem, a stage device 100 comprises a support stage 10, a floating mechanism 20, and a movement stage 30. The movement stage 30 has a propulsion-applying unit 36, and the support stage 10 has a propulsion-receiving unit 11. The stage device 100 is configured so that when the movement stage 30 moves and the propulsion-applying unit 36 contacts or approaches the propulsion-receiving unit 11, the propulsion-applying unit 36 applies propulsion in the movement direction to the propulsion-receiving unit 11.