Stage Driving System With Elastic Connectors For Vibration Absorption

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing stage driving systems for charged-particle beam apparatuses, such as electron microscopes, are complex, expensive, and unreliable, making them difficult to manufacture and maintain effectively.

Innovation Solution

A novel driving system utilizing a combination of first and second actuators connected to the stage via elastic connectors, allowing for precise movement and vibration absorption, simplifying the structure and improving reliability and cost-effectiveness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional stage driving systems are used, then positioning precision can be achieved, but the system becomes complex and expensive to manufacture

Engineering Contradiction:

Improvepositioning precisionVSAvoidsystem complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The stage driving system is divided into multiple independent actuators (first actuator, second actuator, etc.), each responsible for moving specific shafts. This segmentation allows each component to be simpler while collectively achieving precise positioning through coordinated operation of multiple units.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple actuators are combined to work together on a single stage, with each actuator contributing to the overall positioning. The elastic connectors combine the motion from multiple shafts to drive the stage, merging individual simple actions into a coordinated precise positioning system.

Inventive Principle:

Principle #5Merging (Combining)

2Manufacturing precision

If traditional stage driving systems are used, then positioning can be achieved, but the system is expensive and difficult to manufacture

Engineering Contradiction:

Improvepositioning accuracyVSAvoidmanufacturing ease

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The system uses multiple relatively simple and inexpensive actuators instead of a single complex expensive mechanism. Each actuator can be manufactured using standard, cost-effective processes, making the overall system more affordable and easier to manufacture while maintaining positioning accuracy.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The system changes the operational parameters by using elastic connectors that provide compliance and vibration absorption. This allows the use of simpler actuators with relaxed tolerance requirements, easing manufacturing constraints while achieving the required positioning performance.

Inventive Principle:

Principle #35Parameter changes

3Productivity

If traditional stage driving systems are used, then stage movement can be achieved, but reliability is reduced

Engineering Contradiction:

Improvestage movement capabilityVSAvoidsystem reliability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

Elastic connectors are used to provide beforehand cushioning against vibrations and mechanical shocks. These connectors absorb disturbances before they can affect the stage positioning, thereby protecting the system from failures and improving reliability while maintaining movement capability.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

Different parts of the system have specialized local qualities - actuators provide precise motion control, while elastic connectors provide vibration absorption and mechanical compliance. This local specialization allows each component to excel at its specific function, improving overall system reliability.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system provides a simpler, more reliable, and cost-effective means of moving stages in charged-particle beam apparatuses, ensuring precise positioning and vibration absorption, enhancing the operational stability of devices like electron microscopes.

Implementation Method 1

the stage is moved around on a plane such as a horizontal plane by combined elastic forces from the two elastic connectors deformed by the one or two actuators

Methodology Applied

Scientific EffectElastic force: Elasticity

Implementation Method 2

ensuring precise positioning and vibration absorption

Methodology Applied

Scientific EffectVibration absorption: Damping

Data Source

PatentUS11355312B2Stage driving system and apparatus or device such as apparatus of charged-particle beam comprising the same

Publication Date: 2022.06.07 BORRIES PTE LTD

AI summary

The present invention provides a driving system comprising two actuators for moving a stage through two elastic connectors; and a general apparatus/device comprising such a driving system, such as a machine tool, an analytical instrument, an optical microscope, and an apparatus of charged-particle beam such as electron microscope and an electron beam lithographical apparatus. When used in an electron microscope, the stage can be used as a specimen stage or a plate having apertures for electron beam to pass through. The novel stage driving system exhibits numerous technical merits such as simpler structure, better manufacturability, improved cost-effectiveness, and higher reliability, among others.