Stage Driving Range Limiting for Charged Particle Beam Apparatus
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Solution Overview
Problem
Charged particle beam apparatuses in existing technologies fail to consider the shape of sample holders, leading to potential interference with the internal structure of the sample chamber, which can result in operational burdens and inefficiencies.
Innovation Solution
A charged particle beam apparatus that includes a stage supporting a sample holder, a stage driving mechanism, a sample chamber, a focused ion beam column, an electron beam column, a detector, a reading unit for identification information on the sample holder, and a memory unit storing shape information of the holder and chamber structure, which limits the stage driving range to prevent interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the stage driving range is not limited based on sample holder shape, then the operational flexibility is maintained, but interference between the sample holder and internal structure may occur
Solution Approach 1:
The system performs preliminary actions by reading identification information from the sample holder before stage movement, acquiring shape information in advance, and pre-determining the safe driving range. This prevents interference before it occurs rather than reacting to it during operation.
Solution Approach 2:
The system uses identification information (such as barcodes or RFID tags) on the sample holder to access stored shape information in a database, creating a digital representation of the physical holder's geometry. This allows the system to work with copied data rather than directly measuring physical dimensions during operation.
2Reliability
If the stage driving range is limited based on sample holder shape, then interference with internal structure is suppressed, but the operational range may be restricted
Solution Approach 1:
The stage driving range is not fixed but dynamically adjusted based on the specific sample holder being used. The system reads the holder's identification information, retrieves its shape characteristics, and calculates an appropriate driving range that maximizes movement freedom while ensuring collision prevention for that specific holder type.
Solution Approach 2:
The system changes the operational parameters (stage driving range) based on the sample holder's shape parameters. By reading identification information and accessing stored shape data, the system adapts the driving range limits to match the specific geometric characteristics of each holder, optimizing both safety and operational freedom.
3Device complexity
If shape information of sample holder is not considered, then the system complexity is reduced, but interference detection capability is insufficient
Solution Approach 1:
The system extracts only the necessary shape information from the sample holder's identification data and stored database records. Rather than processing complete 3D models or extensive geometric data, the system extracts key dimensional parameters needed for interference detection, reducing information processing complexity while maintaining detection capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses interference between the sample holder and the sample chamber's internal structure, enhancing operational efficiency and preventing potential collisions during stage movement.
Implementation Method 1
a reading unit reading identification information attached to the sample holder
Implementation Method 2
a focused ion beam column irradiating the sample with a focused ion beam
Implementation Method 3
a detector detecting secondary ions or secondary electrons generated from the sample by irradiation with the focused ion beam
Implementation Method 4
an electron beam column irradiating the sample with an electron beam
Implementation Method 5
a detector detecting secondary ions or secondary electrons generated from the sample by irradiation with the focused ion beam or the electron beam
Data Source
AI summary
Disclosed is a charged particle beam apparatus including a stage supporting a sample holder; a stage driving mechanism; a sample chamber; a focused ion beam column; an electron beam column; a detector detecting secondary ions or secondary electrons generated from the sample; a reading unit reading identification information attached to the sample holder; a memory unit storing holder shape information indicating a correspondence relationship between the identification information and a shape of the sample holder, and design information that is shape information of an internal structure of the sample chamber; and a stage driving range limiting unit limiting a driving range of the stage supporting the sample holder on the basis of the shape of the sample holder that is acquired from the identification information read by the reading unit and the holder shape information, and on the basis of a shape of the internal structure.