Stage Apparatus Stator Decoupling for Drive Burden Reduction
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Solution Overview
Problem
Existing charged particle beam apparatuses face challenges in reducing the burden on drive mechanisms, particularly during long stroke driving, which is essential for handling large disk-like semiconductor wafers, as the load on the drive mechanism for long stroke driving cannot be adequately reduced.
Innovation Solution
A stage apparatus is designed with a first table supporting the sample and moving it in one direction, a second table moving the first table in a different direction, and a movable body supporting the stator of the drive mechanism, allowing the stator to be separated from the lower stage table, thereby decentralizing the load and reducing the movable mass.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a single drive mechanism is used for long stroke driving, then the stage can move large disk-like semiconductor wafers, but the burden on the drive mechanism increases
Solution Approach 1:
The drive mechanism is divided into two independent systems: a first drive mechanism for long stroke driving and a second drive mechanism for slight movement driving. This segmentation allows each mechanism to be optimized for its specific function, reducing the burden on the long stroke drive mechanism by offloading precision positioning tasks to the slight movement mechanism.
Solution Approach 2:
A movable body is introduced as an intermediary component that supports the stator of the first drive mechanism. This movable body is moved by the second drive mechanism, allowing the heavy stator to be positioned without requiring the first drive mechanism to handle both long stroke movement and precision positioning, thereby reducing its burden.
2Device complexity
If the stator is fixed to the lower stage table, then the drive mechanism is simple, but the movable mass increases
Solution Approach 1:
The stator is extracted from the lower stage table and mounted on a separate movable body. This extraction reduces the movable mass of the lower stage table, allowing for faster acceleration and deceleration, while the movable body independently handles the stator's movement through the second drive mechanism.
Solution Approach 2:
The drive system is segmented into multiple independent components: the lower stage table for long stroke movement, the movable body for stator positioning, and the second drive mechanism for coordinating their movements. This segmentation optimizes the mass distribution and reduces the inertial load on each component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves compatibility between long stroke driving and reduced burden on the drive mechanism, leading to lower motor heat generation, improved throughput, and reduced visual field positioning errors by minimizing thermal deformation and heat generation.
Implementation Method 1
a first moving mechanism that generates a driving force for moving the first table in the first direction
Implementation Method 2
a second moving mechanism that generates a driving force for moving the second table in the second direction
Data Source
AI summary
An object of the invention is to provide a stage apparatus that realizes compatibility between long stroke driving and reduction of a burden on a drive mechanism. In order to achieve the above object, there is suggested a stage apparatus including a first table that moves a sample in a first direction, a second table that moves the first table in a second direction different from the first direction, moving mechanisms that move the tables, respectively, a movable body that supports a moving mechanism, and a third moving mechanism that moves the movable body so as to follow the second table.