Stage Temperature Control by Alternating Dual Heat-Exchange Media
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Solution Overview
Problem
Existing temperature control systems for plasma processing apparatuses are complex due to the need for multiple parts to control the flow rates of high-temperature and low-temperature heat exchange media, leading to a complicated configuration.
Innovation Solution
A temperature control system that alternately supplies a low-temperature and a high-temperature heat exchange medium to a stage, with a control device calculating the required heat quantity and supply times to achieve a target temperature, simplifying the configuration by eliminating the need for flow rate control mechanisms and mixing tanks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If flow rate control mechanisms and mixing tanks are used to control the temperature of heat exchange media, then precise temperature control is achieved, but the configuration becomes complicated and the number of components increases
Solution Approach 1:
The patent extracts and eliminates the mixing tank and flow rate control mechanisms from the system. Instead of using these complex components to mix hot and cold water, the invention directly supplies pre-adjusted heat exchange media to the circulation pipe, simplifying the system while maintaining temperature control precision through alternative means
Solution Approach 2:
The patent replaces the mechanical mixing system (mixing tank with flow rate controls) with a control system that adjusts the supply timing and temperature of heat exchange media. The control device calculates required heat quantities and supplies appropriately temperature-adjusted media, substituting mechanical mixing with a control-based approach
2Temperature
If multiple valves and flow rate control mechanisms are installed to mix hot and cold water, then temperature control is achieved, but the number of parts increases and maintenance becomes more difficult
Solution Approach 1:
The patent removes multiple valves and flow rate control mechanisms from the system. By directly supplying heat exchange media with already-adjusted temperatures to the circulation pipe, the invention eliminates the need for complex mixing valve assemblies, thereby reducing the number of parts that require maintenance
Solution Approach 2:
The control device performs self-calculation of required heat quantities and automatically controls the supply of heat exchange media based on these calculations. This self-service capability reduces the need for manual intervention and complex control mechanisms, simplifying maintenance requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise temperature control of the stage with a simpler configuration, reducing the number of components and improving operational efficiency.
Implementation Method 1
a heat exchange medium flowing from a first end to a second end of the heat exchange medium flow path
Implementation Method 2
supplying a first heat exchange medium adjusted to have a first temperature... supplying a second heat exchange medium adjusted to have a second temperature
Data Source
AI summary
There is provided a temperature control system, including: a stage configured to support a workpiece and provided with a heat exchange medium flow path formed within the stage, the heat exchange medium flow path including a first end and a second end; a first valve; a second valve; a first heat exchange medium supply device including a supply port which supplies a first heat exchange medium adjusted to have a first temperature and a recovery port; a second heat exchange medium supply device including a supply port which supplies a second heat exchange medium adjusted to have a second temperature higher than the first temperature and a recovery port; and a control device configured to control the first and second valves such that the first and second heat exchange mediums are alternately supplied to the first end of the heat exchange medium flow path.