Staggered Bit-Line Contact Layout for Reduced Memory Pitch

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Solution Overview

Problem

Current memory devices face challenges in reducing the pitch between bit-lines, which limits the density and size of memory arrays due to constraints on bit-line to bit-line leakage and breakdown voltage, making it difficult to further minimize the pitch without compromising performance.

Innovation Solution

The proposed solution involves offsetting some bit-line contacts in a staggered pattern, allowing for a reduced bit-line pitch while maintaining the effective distance between contacts, thereby increasing the density of memory cells without compromising reliability or size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the pitch between bit-lines is reduced to increase memory density, then the memory cell density increases, but the bit-line to bit-line leakage and breakdown voltage are compromised

Engineering Contradiction:
Improvememory cell densityVSAvoidbit-line leakage and breakdown voltage
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent transitions from a conventional planar arrangement where all bit-line contacts are aligned in the same dimension to a staggered pattern that introduces a second dimensional offset. This dimensional change allows bit-line contacts to be positioned at different lateral locations, effectively increasing the isolation distance between adjacent bit-lines while maintaining the same pitch, thus resolving the contradiction between high density and reliable electrical isolation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements asymmetry by offsetting alternating bit-line contacts in a staggered pattern rather than maintaining symmetric alignment. This asymmetric positioning creates increased spacing and isolation between non-adjacent bit-lines while preserving the compact pitch, thereby achieving both high memory cell density and improved electrical isolation to prevent leakage and breakdown.

Inventive Principle:
Principle #4Asymmetry

2Area of stationary object

If the pitch between bit-lines is reduced to minimize memory device size, then the area occupied by memory arrays decreases, but the isolation and voltage integrity between bit-lines deteriorate

Engineering Contradiction:
Improvememory device areaVSAvoidisolation and voltage integrity
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent uses dimensional repositioning by staggering bit-line contacts in the lateral direction while maintaining compact vertical spacing. This allows the memory device to achieve minimal footprint area while the staggered arrangement provides enhanced isolation distance, preserving voltage integrity without increasing the overall device area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

By implementing an asymmetric staggered pattern where alternating bit-line contacts are offset, the patent achieves compact area utilization while creating sufficient isolation zones. This asymmetric layout ensures that adjacent bit-lines maintain adequate spacing for electrical isolation, preventing leakage and breakdown while minimizing the total memory device area.

Inventive Principle:
Principle #4Asymmetry

3Quantity of substance

If a staggered pattern is used to offset bit-line contacts, then the effective distance between contacts is maintained while pitch is reduced, but the manufacturing complexity increases

Engineering Contradiction:
Improvememory cell densityVSAvoidcontact arrangement complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent divides the bit-line contact array into segmented groups with alternating offset positions. This segmentation into a repeating staggered pattern simplifies the manufacturing process by creating a predictable, modular structure that can be fabricated using standard photolithography techniques, reducing the actual complexity despite the improved density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent modifies the spatial parameters of bit-line contacts by introducing a systematic offset pattern. This parameter change transforms the conventional aligned arrangement into a staggered configuration, achieving higher density while the regular, repeating nature of the pattern keeps manufacturing complexity manageable through predictable fabrication processes.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11973031B2Reduced pitch memory subsystem for memory device
Publication Date: 2024.04.30 MICRON TECHNOLOGY INC
  • US11973031B2 patent drawing
  • US11973031B2 patent drawing
  • US11973031B2 patent drawing

AI summary

A memory device includes an array of memory cells and a plurality of bit-lines with each bit-line connected to a respective set of memory cells of the array of memory cells. The memory device includes a memory subsystem having first and second memory circuits. Each first memory circuit can be disposed laterally adjacent to a second memory circuit. Each first memory circuit includes a first bit-line connection and each second memory circuit including a second bit-line connection, the first and second bit-line connections can connect to respective bit-lines. Each first bit-line connection is disposed on a first bit-line connection line of the memory subsystem and each second bit-line connection is disposed on a second bit-line connection line of the memory subsystem, and the second bit-line connection line can be offset from the first bit-line connection line by a predetermined distance that is greater than zero.