Staggered Cam Latch for Semiconductor Substrate Containers

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Semiconductor substrate containers face challenges in maintaining a robust seal, particularly in larger diameter carriers, to prevent contamination and moisture/oxygen leakage, as smaller circuit geometries increase sensitivity to particulates and environmental factors.

Innovation Solution

A latching mechanism with a rotatable cam having two independent rotational profiles out of phase, distributing latch members around the perimeter of the container door to ensure even loading and staggered engagement, enhancing the seal quality and reducing deflection during transport.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a simple latch mechanism is used, then the device complexity is reduced, but the seal quality and reliability deteriorate

Engineering Contradiction:

Improvelatch mechanism complexityVSAvoidseal quality

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The latch mechanism is segmented into multiple independent latch members (at least two) distributed around the perimeter of the door, each engaging with corresponding openings in the door frame. This segmentation allows the sealing force to be distributed across multiple points, improving overall seal quality and reliability without requiring a single complex latch structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple latch members are combined into a single integrated mechanism that operates simultaneously through a common actuating force. The latch members work together as a unified system to provide both simplified operation and enhanced sealing reliability through distributed engagement points around the door perimeter.

Inventive Principle:

Principle #5Merging (Combining)

2Reliability

If multiple latch members are distributed around the perimeter, then the seal quality improves, but the device complexity increases

Engineering Contradiction:

Improveseal qualityVSAvoidlatch mechanism complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The latch mechanism is designed with universal functionality where a single actuating force simultaneously controls multiple latch members. This multi-functional design allows one operational input to manage multiple sealing points, reducing the need for separate control mechanisms for each latch member and thereby limiting the increase in device complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Object-affected harmful factors

If the door is secured with multiple latch members, then the resistance to contamination and moisture leakage improves, but the manufacturing complexity increases

Engineering Contradiction:

Improvecontamination resistanceVSAvoidmanufacturing complexity

Core Design Contradiction:

Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The sealing function is segmented into multiple discrete latch members positioned around the door perimeter, each providing independent sealing at its engagement point. This segmentation enhances contamination and moisture resistance by creating multiple barrier points, while the modular nature of individual latch members keeps manufacturing complexity manageable through repetition of standardized components.

Inventive Principle:

Principle #1Segmentation

4Reliability

If latch members are engaged simultaneously, then the sealing effectiveness improves, but the force distribution becomes uneven causing deflection

Engineering Contradiction:

Improvesealing effectivenessVSAvoiddoor deflection

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The latch mechanism incorporates local quality variations through the spatial distribution of latch members around the door perimeter. By positioning latch members at strategically located points, the sealing force is locally applied where most needed, while the distributed arrangement prevents concentrated loading that would cause door deflection and maintain structural stability.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a robust and effective seal, minimizing moisture and oxygen conductance, and reducing the risk of contamination, while maintaining the integrity of semiconductor wafers during processing and transport.

Implementation Method 1

Methodology Applied

Scientific EffectMechanical Force: Mechanical Force

Data Source

PatentUS11398395B2Substrate container with latching mechanism having two cam profiles

Publication Date: 2022.07.26 ENTEGRIS INC

AI summary

A door of a substrate container includes a latching mechanism for operating at least two latch members. The substrate container can be a front opening substrate container or a bottom opening substrate container. The latching mechanism can include a rotatable cam having a first rotational profile out of phase with a second rotational profile such that when the cam is rotated to operate the latch mechanism from the disengaged position to the engaged position, a first latch member engages a first corresponding slot in a door frame prior to a second latch member engaging a second corresponding opening provided in the door frame such that the latch members are operated in a staggered manner. This staggered latching configuration allows for the application of a load provided by the system to be used in the most efficient manner per latch arm or per set of latch arms.