Staggered Coil Linear Motor Reducing Magnetic Flux Leakage

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Solution Overview

Problem

Current photolithographic linear motors face challenges in achieving high-precision positioning and driving forces due to magnetic flux leakage and inconsistent magnetic flux density distribution, which limits their ability to provide desirable control forces and moments in three degrees of freedom.

Innovation Solution

A linear motor design featuring a magnet unit with symmetrically arranged first and second magnet arrays and a coil unit with staggered coil arrays in the Z-axis direction, generating control forces along the Y-axis and Z-axis directions and a moment about the X-axis, utilizing a Halbach array configuration with prismatic magnets to enhance magnetic flux density and reduce leakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional NS magnet arrays and single-layered coil arrays are used, then the motor structure is simple, but magnetic flux leakage occurs and precision positioning is insufficient

Engineering Contradiction:
Improvepositioning precisionVSAvoidmagnet array configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The magnet array is segmented into multiple types (first-type, second-type, third-type magnets) arranged in specific patterns, and the coil array is divided into multiple layers. This segmentation allows optimization of magnetic flux distribution and elimination of leakage while maintaining controllable complexity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs asymmetric magnet arrangements including Halbach arrays where magnet polarities are asymmetrically distributed to maximize magnetic flux in desired directions while minimizing leakage. The coil layers are also asymmetrically positioned at different heights to optimize force generation and reduce ripple effects.

Inventive Principle:
Principle #4Asymmetry

2Ease of manufacture

If laterally aligned cuboid-shaped magnets are used, then manufacturing is simple, but magnetic flux leakage occurs at the magnetic yoke causing precision control difficulties

Engineering Contradiction:
Improvemagnet shape fabricationVSAvoidprecision control
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

Different regions of the magnet array have different magnet shapes and orientations optimized for their specific functions. For example, magnets at boundaries may have different configurations than those in the center to prevent flux leakage, while maintaining overall manufacturing feasibility through standardized production techniques.

Inventive Principle:
Principle #3Local quality

3Productivity

If high-speed movement capability is increased, then throughput is improved, but high-precision positioning becomes more difficult to achieve

Engineering Contradiction:
ImprovethroughputVSAvoidpositioning precision
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The motor design incorporates dynamic control capabilities through multi-layer coil arrays that can be independently controlled, allowing the system to adapt to different operational modes. The magnetic field distribution is dynamically adjustable to optimize for either high-speed movement or high-precision positioning as needed.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent enables parameter changes in the magnetic field strength, coil current distribution, and magnet array configuration to optimize performance for different operational requirements. By adjusting these parameters, the system can achieve high-speed movement when throughput is prioritized and high-precision positioning when accuracy is critical.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves increased vertical and horizontal magnetic fluxes, allowing for higher driving forces in six degrees of freedom, improved precision positioning, and reduced mass, while eliminating torsional moments and magnetic flux leakage.

Implementation Method 1

the coil unit includes a first coil array and a second coil array arranged in a stacked manner in the Z-axis direction and the first and second coil arrays are staggered from each other by a distance of ΔP in the Y-axis direction, and ΔP is so set that when the coil unit is provided with a desired electrical current from a control system, the coil unit generates a first control force along the Y-axis direction, a second control force along the Z-axis direction, and a moment about the X-axis direction

Methodology Applied
Scientific EffectElectromagnetic force: Lorentz Force

Implementation Method 2

A linear motor design featuring a magnet unit with symmetrically arranged first and second magnet arrays and a coil unit with staggered coil arrays in the Z-axis direction, generating control forces along the Y-axis and Z-axis directions and a moment about the X-axis, utilizing a Halbach array configuration with prismatic magnets to enhance magnetic flux density and reduce leakage

Methodology Applied
Scientific EffectMagnetic flux: Magnetic Field

Implementation Method 3

utilizing a Halbach array configuration with prismatic magnets to enhance magnetic flux density and reduce leakage

Methodology Applied
Scientific EffectHalbach array: Halbach Array

Data Source

PatentUS9755493B2Linear motor and stage apparatus
Publication Date: 2017.09.05 AMIES TECHNOLOGY CO LTD
  • US9755493B2 patent drawing
  • US9755493B2 patent drawing
  • US9755493B2 patent drawing

AI summary

A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of ΔP in the Y-axis direction. ΔP satisfies: when a control system charges the coil unit with a desired current, the coil unit generates a control force along the Y-axis direction, another control force along the Z-axis direction, and a moment about the X-axis direction, which may reduce a magnetic flux leakage and provide higher driving forces, making the linear motor generate required three degrees-of-freedom control force or control torque, and further improve vertical and horizontal magnetic fluxes in the magnet array.