Staggered Semiconductor Die Underfill Support

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Solution Overview

Problem

In semiconductor packages with stacked dies, the protruding portions of dies lack support during wire bonding, leading to bending, poor registration, unreliable bonds, and potential damage due to the absence of underfill material under the cantilevered sections.

Innovation Solution

The introduction of underfill material under the protruding portions of stacked dies provides mechanical support, reducing deflection and enhancing wire bonding reliability by curing the underfill to form a stable support structure beneath the dies during the bonding process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If dies are stacked in a staggered manner to allow exposure of bond pads, then wire bonding accessibility is improved, but the protruding portions of dies lack support and bend during wire bonding

Engineering Contradiction:
Improvewire bonding accessibilityVSAvoiddie stability during wire bonding
Core Design Contradiction:
Ease of operationVSStability of the object's composition

Solution Approach 1:

Underfill material is applied to the substrate before the die is mounted, creating a support structure in advance. This preliminary action ensures that when the die is stacked in a staggered manner, the protruding portions have immediate support, preventing bending during wire bonding while maintaining bond pad accessibility.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Underfill material acts as an intermediary substance between the substrate and the die. It fills the space under the protruding portions of the die, providing mechanical support and stability. This intermediary structure enables the die to maintain its position and resist bending forces during wire bonding operations.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If underfill material is provided under protruding portions of stacked dies, then die deflection during wire bonding is reduced, but manufacturing process complexity increases

Engineering Contradiction:
Improvewire bonding registration accuracyVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The underfill material is applied to the substrate before die mounting, creating a pre-formed support structure. This preliminary preparation simplifies the overall manufacturing process by eliminating the need for complex support structures or post-mounting adjustments, while ensuring high wire bonding registration accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention changes the physical state and distribution of the underfill material by applying it in a controlled manner before die mounting. This parameter change in the manufacturing process allows for precise control of underfill placement, achieving high manufacturing precision without significantly increasing process complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of underfill material significantly reduces die deflection and misalignment during wire bonding, resulting in more reliable and robust wire bonds, while minimizing the risk of die damage, and allows for thinner dies without increased cracking risks.

Implementation Method 1

curing the underfill to form a stable support structure beneath the dies during the bonding process

Methodology Applied
Scientific EffectCuring:

Data Source

PatentUS10796975B2Semiconductor package with supported stacked die
Publication Date: 2020.10.06 INTEL CORP
  • US10796975B2 patent drawing
  • US10796975B2 patent drawing
  • US10796975B2 patent drawing

AI summary

Semiconductor packages with electromagnetic interference supported stacked die and a method of manufacture therefor is disclosed. The semiconductor packages may house a stack of dies in a system in a package (SiP) implementation, where one or more of the dies may be wire bonded to a semiconductor package substrate. The dies may be stacked in a partially overlapping, and staggered manner, such that portions of some dies may protrude out over an edge of a die that is below it. This dies stacking may define a cavity, and in some cases, wire bonds may be made to the protruding portions of the die. Underfill material may be provided in the cavity and cured to form an underfill support. Wire bonding of the bond pads overlying the cavity formed by the staggered stacking of the dies may be performed after the formation of the underfill support.