Staggered Film Coating Layout for Positional Accuracy
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Solution Overview
Problem
Existing film forming methods using multiple discharge units, such as printheads, face a trade-off between productivity and quality, where higher productivity can lead to reduced positional accuracy and increased defects, resulting in lower device quality and potential issues like short circuits and leakage.
Innovation Solution
The method involves using a film forming device with multiple discharge heads along the transport direction, each equipped with nozzles intersecting the transport direction, applying a first liquid, a second liquid, and a third liquid in a staggered manner to improve positional accuracy and reduce application errors, thereby enhancing film uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple discharge units are used to increase productivity, then film formation speed is improved, but positional accuracy deteriorates and defects increase
Solution Approach 1:
The patent introduces a staggered arrangement of discharge heads along the transport direction, creating a dimensional offset pattern. This staggered configuration allows multiple discharge units to operate at different positions, maintaining high productivity while reducing positional errors through dimensional distribution rather than concentration in a single plane.
Solution Approach 2:
The film formation process is segmented into multiple discharge heads operating in sequence along the transport direction. Each discharge head handles a specific segment of the coating process, and the staggered positioning ensures that errors in one segment do not propagate to others, thereby maintaining overall positional accuracy despite using multiple units for high productivity.
2Productivity
If multiple discharge units are used to increase productivity, then film formation speed is improved, but device quality deteriorates due to increased defects
Solution Approach 1:
By arranging discharge heads in a staggered pattern along the transport direction, the patent distributes the risk of defects across different spatial positions. This dimensional arrangement ensures that defects in one discharge head do not directly translate to defects in others, maintaining device quality while achieving high productivity through parallel operation.
Solution Approach 2:
The staggered arrangement acts as a cushioning mechanism against defect propagation. By positioning discharge heads at offset locations, the system预先 (in advance) prepares for potential positioning errors or defects in individual heads, allowing the overall film quality to remain high even when some individual units exhibit minor defects.
3Loss of time
If liquids are applied at the same position to improve efficiency, then processing time is reduced, but application position errors concentrate and film uniformity deteriorates
Solution Approach 1:
The patent applies liquids at different positions along the transport direction rather than concentrating all applications at the same location. This dimensional distribution of application points allows parallel processing (reducing time loss) while preventing error concentration, thereby maintaining film uniformity through spatial diversification of the coating process.
Data Source
AI summary
A film forming method includes applying liquids to a material by discharging the liquids from each of a plurality of discharge heads disposed along a transport direction of the material. Each of the discharge heads has a plurality of liquid discharge nozzles disposed along a direction intersecting the transport direction. The applying includes applying at least a first liquid, a second liquid, and a third liquid from each of the plurality of discharge heads. The second liquid is applied to a position substantially equal to a position to which the first liquid is applied along a width direction. The third liquid is applied to an intermediate position between the position to which the first liquid is applied and the position to which the second liquid is applied along the transport direction, the intermediate position being different from the position to which the first liquid is applied along the width direction.