Staggered Unit Return Timing for Vacuum Substrate Processing Energy Control
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Solution Overview
Problem
Conventional substrate processing technologies face challenges in accurately controlling the condition of the processing chamber during the transition from energy saving mode to normal mode in vacuum substrate processing apparatuses, leading to inefficient energy consumption and potential damage to the apparatus.
Innovation Solution
A control device and method that includes a storing device for recording the return time for each unit from energy saving mode to normal mode, a management device for determining the return start timing based on stored data, and a unit controller for independently controlling each unit's transition, ensuring accurate timing and minimizing energy consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If units are stopped during standby period to save energy, then energy consumption is reduced, but the time required to return to normal mode increases
Solution Approach 1:
The control device performs preliminary actions by storing return time information for each unit before entering energy saving mode. When transitioning back to normal mode, the control device uses this pre-stored information to calculate and execute optimized return start timings, avoiding the need for units to return simultaneously and reducing the overall transition time while maintaining energy efficiency.
2Reliability
If all units are returned to normal mode simultaneously, then the processing chamber condition can be restored, but the control precision and stability deteriorate
Solution Approach 1:
The control device segments the return process by calculating individual return start timings for each unit based on their specific return time characteristics. Instead of simultaneous return, units are returned in a staggered sequence, with each unit's return timing precisely controlled according to its stored return time data, thereby maintaining both stability and control precision.
3Manufacturing precision
If the substrate processing apparatus operates continuously in normal mode, then processing accuracy is maintained, but energy consumption increases
Solution Approach 1:
The control device dynamically adjusts the operating mode of each unit based on real-time processing needs. Units can transition between normal mode and energy saving mode as required, with the control device managing the transitions using stored return time information. This dynamic approach maintains processing accuracy when needed while reducing energy consumption during standby periods.
Data Source
AI summary
A control device controls a substrate processing apparatus including a processing chamber for processing a substrate and a plurality of units for controlling a condition in the processing chamber. The control device includes a storing device for storing a return time required for each unit to be returned from an energy saving mode to a normal mode; a management device for obtaining a return start timing for each unit to be returned from the energy saving mode to the normal mode, based on the return time of each unit stored in the storing device; and a unit controller for independently controlling each unit to be returned from the energy saving mode to the normal mode, based on the return start timing of each unit obtained by the management device.