Stainless Steel Passivation Film Moisture Desorption

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Solution Overview

Problem

Stainless steel components in processing apparatuses are prone to corrosion due to moisture trapped in passivation films, leading to metallic contamination, as existing methods either fail to effectively remove chemically adsorbed moisture or are costly and unsuitable for complex shapes.

Innovation Solution

A method involving heating stainless steel components to 300° C. or higher to desorb chemically adsorbed moisture from the passivation film, effectively reducing corrosion by removing both physically and chemically adsorbed moisture, thereby protecting the chromium passivation film and preventing contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a bake-out process is applied at low temperature (120-150°C) to remove moisture, then the process is simple and low-cost, but chemically adsorbed moisture in the passivation film remains and corrosion occurs

Engineering Contradiction:
Improvesimplicity and cost of moisture removal processVSAvoidcorrosion resistance of stainless steel
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies the parameter changes principle by increasing the bake-out temperature from the conventional 120-150°C to 300°C or higher. This temperature parameter change enables the removal of chemically adsorbed moisture in the passivation film that cannot be removed at lower temperatures, thereby preventing corrosion while maintaining process simplicity.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If high temperature heating (300°C or higher) is applied to remove chemically adsorbed moisture, then corrosion resistance is improved, but energy consumption increases

Engineering Contradiction:
Improvecorrosion resistance of stainless steelVSAvoidenergy consumption of heating process
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent applies preliminary action by performing high-temperature heating (300°C or higher) before the stainless steel components are installed or used in the processing apparatus. This preliminary moisture removal prevents corrosion from occurring in the first place, avoiding the need for subsequent maintenance, disassembly, and reprocessing that would consume much more energy.

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If conventional bake-out process is used, then the process is simple, but metallic contamination (Cr, Fe, Ni) and particle generation occur due to corrosion

Engineering Contradiction:
Improvesimplicity of moisture removal processVSAvoidmetallic contamination and particle generation
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The patent applies parameter changes by raising the heating temperature to 300°C or higher, which fundamentally changes the moisture removal mechanism from only physical desorption at low temperatures to including chemical desorption from the passivation film. This parameter change eliminates the corrosion mechanism that generates metallic contamination and particles, while the process remains simple and equipment-free.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces corrosion and contamination of stainless steel components, ensuring the longevity and reliability of processing apparatuses by maintaining the integrity of the chromium passivation film, even in complex shapes, and preventing metallic contamination.

Implementation Method 1

heating the metal member for a predetermined period at a temperature of 300° C. or higher

Methodology Applied
Scientific EffectDesorption: Desorption

Data Source

PatentUS10895014B2Processing method and processing apparatus of metal member
Publication Date: 2021.01.19 TOKYO ELECTRON LTD
  • US10895014B2 patent drawing
  • US10895014B2 patent drawing
  • US10895014B2 patent drawing

AI summary

A method of processing a metal member having a passivation film on its surface is provided. The method includes a step of heating the metal member for a predetermined period at a temperature of 300° C. or higher.