Stamper Guide Pattern Segmentation for Dot Positioning
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Solution Overview
Problem
Existing methods for manufacturing bit patterned media face challenges in orderly arranging self-assembled dots over a wide area due to limitations in the accuracy and density of post guides used for controlling the arrangement of magnetic dots, leading to instability and positional errors in the dot arrangement.
Innovation Solution
A stamper with a base portion and guides arranged in specific directions, where the distance between guides is optimized to within a range of integer multiples of the dot pitch, ensuring stable arrangement of self-assembled dots by using a combination of electron beam drawing and electroforming processes to create precise post guide patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If guide patterns are disposed with high accuracy and density to control self-assembled dots arrangement, then arrangement precision improves, but manufacturing complexity and difficulty increase
Solution Approach 1:
The guide pattern is segmented into multiple regions with different guide line densities. A first region contains guide lines at a first density, while a second region contains guide lines at a second density that is lower than the first density. This segmentation allows different areas to have different levels of control precision matched to their specific needs, reducing overall manufacturing complexity while maintaining arrangement precision where required.
Solution Approach 2:
Different regions of the guide pattern are assigned different local qualities in terms of guide line density. The first region has higher guide line density for areas requiring precise dot arrangement control, while the second region has lower density for areas where less precision is needed. This local differentiation optimizes the balance between arrangement precision and manufacturing complexity by applying high precision only where necessary.
2Stability of the object's composition
If guide patterns are disposed with high density to control arrangement over wide area, then arrangement stability improves, but manufacturing difficulty increases
Solution Approach 1:
The guide pattern is divided into multiple regions with different guide line densities. The first region has higher density for stable dot arrangement, while the second region has lower density that is easier to manufacture. This segmentation maintains arrangement stability in critical areas while reducing manufacturing difficulty in less critical areas.
Solution Approach 2:
Different regions have different guide line densities tailored to their specific requirements. Areas requiring high stability have denser guide lines, while other areas have sparser guide lines that are easier to manufacture. This local quality differentiation achieves arrangement stability where needed without uniformly increasing manufacturing difficulty across the entire pattern.
3Measurement precision
If guide lines are arranged with integer multiple spacing of dot pitch, then positional accuracy improves, but guide pattern density increases
Solution Approach 1:
The guide pattern is segmented into regions with different guide line densities. The first region uses integer multiple spacing of dot pitch for high positional accuracy, while the second region uses lower density spacing. This segmentation achieves high positional accuracy in critical areas without requiring high density throughout the entire guide pattern, thus reducing the overall quantity of guide lines.
Solution Approach 2:
Different regions are assigned different guide line densities based on their positional accuracy requirements. Areas requiring high precision have guide lines spaced at integer multiples of the dot pitch, while other areas have sparser guide lines. This local quality approach improves positional accuracy where needed without unnecessarily increasing guide pattern density across the entire structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the stable and high-density arrangement of self-assembled dots, reducing positional errors and improving the accuracy of the dot pattern, facilitating efficient information recording and storage in magnetic recording media.
Implementation Method 1
using electron beam drawing and electroforming processes to create precise guide patterns
Implementation Method 2
using electron beam drawing and electroforming processes to create precise guide patterns
Implementation Method 3
forming self-assembled dots with the use of self-assembly performance of block copolymer
Data Source
AI summary
A stamper of an embodiment includes: a base portion having a main surface; and a plurality of guides arranged on the main surface in mutually different first and second directions and serving as references of arrangement of a plurality of self-assembled dots. A distance between the guides in a third direction is within a range of an integer m1 ±0.05 times of a pitch of the plural self-assembled dots. The third direction corresponds to a third vector obtained by combining a first vector corresponding to the arrangement of the guides in the first direction and a second vector corresponding to the arrangement of the guides in the second direction. A distance between the plural guides in the first direction falls out of a range of an integer m2 ±0.15 times of the pitch of the plural self-assembled dots.