Standard Cell Boundary Compensation for Non-Uniform Conditions

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Solution Overview

Problem

The increasing miniaturization of standard cells in semiconductor integrated circuits makes it difficult to maintain uniform boundary conditions, leading to inefficiencies and reduced manufacturability, as non-uniform boundary conditions impact the electrical performance and yield of neighboring cells.

Innovation Solution

Introducing a further non-uniformity in the boundary conditions of standard cells to mitigate the effects of existing non-uniformities on neighboring cells, allowing these additional features to extend across cell boundaries and compensate for the original non-uniformities, thereby increasing the number of ways to address boundary condition issues without affecting the cell's logical function.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If standard cell area is reduced to increase density, then productivity is improved, but manufacturing precision deteriorates due to non-uniform boundary conditions

Engineering Contradiction:

Improvestandard cell densityVSAvoidboundary condition uniformity

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent converts the harmful non-uniform boundary conditions into a benefit by deliberately introducing compensating non-uniformities. Instead of trying to eliminate all non-uniformities, the method introduces specific non-uniform features that counterbalance the harmful effects, thereby improving printability and manufacturing precision while maintaining high cell density

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent applies local quality by introducing non-uniformities at specific locations within the standard cell that are tailored to compensate for local boundary conditions. Each cell can have customized non-uniform features placed strategically to address its specific boundary issues, rather than applying a uniform solution across all cells

Inventive Principle:

Principle #3Local quality

2Productivity

If standard cell area is reduced to increase density, then productivity is improved, but reliability deteriorates due to impacted electrical performance

Engineering Contradiction:

Improvestandard cell densityVSAvoidelectrical performance

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent converts the harmful electrical performance impacts into a benefit by using compensating non-uniformities to balance out adverse electrical effects. The introduced non-uniformities are designed to counterbalance harmful electrical interactions, thereby maintaining reliability while achieving high density

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Manufacturing precision

If non-uniform boundary conditions are introduced to compensate for other non-uniformities, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:

Improvepattern printabilityVSAvoidboundary condition configuration

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by modifying the geometric parameters of standard cells - specifically introducing variations in feature sizes, positions, and shapes. These parameter modifications are made systematically to compensate for boundary non-uniformities, improving printability while keeping the complexity manageable through structured parameter adjustments

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS8051390B2Compensating for non-uniform boundary conditions in standard cells

Publication Date: 2011.11.01 ARM LTD

AI summary

A method of design of a standard cell and a standard cell is disclosed. The method design comprising the steps of: identifying a non-uniformity in a boundary condition of said standard cell that would affect a characteristic of a neighbouring standard cell; introducing a further non-uniformity into said cell to mitigate the effect of said identified non-uniform boundary condition on said characteristic of said neighbouring standard cell.