Standard Cell Rail Layout for Faster, Lower-Resistance ICs

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Solution Overview

Problem

The miniaturization of integrated circuits (ICs) poses design and manufacturing challenges, including stricter specifications and reliability issues, which existing electronic design automation (EDA) tools struggle to address effectively in terms of standard cell layout design and manufacturing.

Innovation Solution

The proposed solution involves a specific IC structure design with a first standard cell, including active regions and gate structures, along with rail layouts, that optimize area and layout levels to enhance speed and reduce resistance, utilizing shallow trench isolation (STI) patterns and fin layouts to improve performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If standard cell layout designs are miniaturized to reduce device size and power consumption, then device functionality and speed are improved, but manufacturing precision and reliability become more difficult to maintain

Engineering Contradiction:
Improvedevice speedVSAvoidlayout design precision
Core Design Contradiction:
SpeedVSManufacturing precision

Solution Approach 1:

The standard cell layout is segmented into distinct functional regions (first active region, second active region, intermediary region) with clear boundaries defined by shallow trench isolation patterns. This segmentation allows each region to be independently optimized for its specific function while maintaining overall manufacturing precision through standardized region definitions and spacing requirements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the standard cell are assigned different qualities and functions: the first and second active regions are optimized for electrical performance with specific doping characteristics, while the intermediary region provides isolation and mechanical support. The shallow trench isolation patterns are locally positioned to provide optimal separation without unnecessarily constraining the active regions, thus maintaining manufacturing precision while enabling high-speed performance.

Inventive Principle:
Principle #3Local quality

2Speed

If active regions are enlarged to improve speed performance and reduce resistance, then power efficiency is enhanced, but device area increases

Engineering Contradiction:
Improvespeed performanceVSAvoidstandard cell area
Core Design Contradiction:
SpeedVSArea of moving object

Solution Approach 1:

The standard cell layout utilizes vertical layering with the gate structure positioned at a different level (second level) than the active regions (first level). This three-dimensional arrangement allows the active regions to be enlarged for improved electrical performance without proportionally increasing the planar footprint, as the gate structure overlaps the active regions in the vertical dimension, effectively using the Z-axis to reduce the X-Y area occupation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The gate structure is nested over the active regions, with the gate extending in the second direction and overlapping both the first and second active regions. This nesting arrangement allows the control structure to be positioned directly above the functional regions it controls, maximizing the effective use of space and enabling larger active region areas for improved speed and power efficiency without proportionally increasing the overall cell area.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Use of energy by moving object

If rail placements are optimized to reduce resistance and improve power delivery, then power efficiency is enhanced, but layout complexity increases

Engineering Contradiction:
Improvepower efficiencyVSAvoidlayout complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The shallow trench isolation patterns serve multiple functions simultaneously: they provide electrical isolation between adjacent standard cells, define the boundaries of active and intermediary regions, and serve as structural references for positioning the gate and rail structures. This multi-functionality reduces the need for additional dedicated isolation structures, thereby simplifying the overall layout while maintaining optimized power delivery paths through the rails.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS11790148B2Integrated circuit and method of forming an integrated circuit
Publication Date: 2023.10.17 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11790148B2 patent drawing
  • US11790148B2 patent drawing
  • US11790148B2 patent drawing

AI summary

An IC structure includes a first cell and a first and second rail. The first cell includes a first and second active region and a first, a second and a third gate structure. The first active region having a first dopant type. The second active region having a second dopant type. The first gate structure extending in a second direction, overlapping the first or the second active region. The second gate structure extending in the second direction, and overlapping a first edge of the first or second active region. The third gate structure extending in the second direction, and overlapping at least a second edge of the first or second active region. The first rail extending in the first direction and overlapping a middle portion of the first active region. The second rail extending in the first direction and overlapping a middle portion of the second active region.