Standard Cell Layout With Split Active Regions for Timing Paths
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Solution Overview
Problem
The increasing complexity and miniaturization of semiconductor devices pose challenges in improving device robustness, reducing manufacturing cost, and processing time, particularly in advanced field-effect transistors like nanosheet FETs, where existing layout methods fail to optimize timing-critical and non-timing-critical device units effectively.
Innovation Solution
A layout method is introduced where timing-critical device units are arranged in wide active regions of a row and non-timing-critical units in adjacent narrow regions, with aligned source regions connecting to a common power line without altering BEOL processes, optimizing the layout and reducing complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If timing-critical and non-timing-critical device units are arranged in the same row with uniform active regions, then the layout is simple and manufacturing is easy, but the speed and performance of timing-critical paths are not optimized
Solution Approach 1:
The patent applies local quality by creating different active region widths within the same row: wide active regions for timing-critical device units and narrow active regions for non-timing-critical device units. This localized differentiation optimizes performance where needed while maintaining simplicity elsewhere, resolving the contradiction between speed optimization and layout complexity.
Solution Approach 2:
The patent segments the active regions into different width categories (wide and narrow) within the same row, allowing timing-critical and non-timing-critical device units to be differentiated by their active region width. This segmentation enables performance optimization without requiring complete layout redesign.
2Reliability
If separate power lines are provided for timing-critical and non-timing-critical device units, then power supply stability is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent makes the common power line multi-functional by having it serve both timing-critical and non-timing-critical device units simultaneously. The power line extends across the entire row and provides power to all device units through via connections, eliminating the need for separate power lines while maintaining power supply stability.
Solution Approach 2:
The patent merges the power supply infrastructure by consolidating separate power lines for timing-critical and non-timing-critical device units into a single common power line that serves both groups, reducing manufacturing complexity while maintaining reliability.
3Speed
If device units are arranged to optimize timing performance, then speed is improved, but area consumption increases
Solution Approach 1:
The patent applies partial action by providing wide active regions only to timing-critical device units that require enhanced performance, while non-timing-critical device units use narrow active regions. This selective approach optimizes timing performance where necessary without unnecessarily increasing the area for all device units.
Data Source
AI summary
A layout method is provided. A timing analysis is performed based on design data of a standard cell to classify a plurality of device units of the standard cell into a timing-critical group and a non-timing-critical group. A plurality of first sources regions in the device units of the non-timing-critical group are aligned with a plurality of second sources regions in the device units of the timing-critical group in a first direction in floorplan of the standard cell in a layout. The device units of the timing-critical group are arranged in a first row of a cell array and the device units of the non-timing-critical group are arranged in a second row of the cell array. The first and second rows of the cell array share a common power line. First active regions of the first row are wider than second active regions of the second row.