Standby Chamber Gas Flow Layout for Uniform Substrate Cooling
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Solution Overview
Problem
Existing substrate processing systems face inefficiencies in cooling substrates in standby chambers, leading to non-uniform temperature distribution and prolonged cooling times.
Innovation Solution
A substrate processing apparatus with a support system that aligns substrates vertically and uses multiple inert gas suppliers to supply inert gas from different directions, optimizing gas flow and temperature distribution, and an exhaust system to manage pressure and gas retention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If inert gas is supplied to substrates in a standby chamber, then cooling of substrates is achieved, but cooling efficiency is insufficient and cooling time is prolonged
Solution Approach 1:
The patent applies dimensionality change by supplying inert gas from multiple directions (front, rear, and side surfaces) rather than a single direction. This multi-directional gas supply approach transforms the cooling process from one-dimensional to three-dimensional, enabling simultaneous cooling of both surfaces and edges of the substrate, thereby significantly reducing cooling time and improving cooling efficiency.
2Temperature
If inert gas is supplied to substrates in a standby chamber, then cooling is achieved, but inert gas consumption is excessive
Solution Approach 1:
The patent implements local quality by directing inert gas to specific regions of the substrate based on their cooling needs. Gas is supplied to the front surface, rear surface, and side edges through separately controlled suppliers, allowing optimized gas distribution that reduces overall consumption while ensuring effective cooling of all substrate regions.
3Volume of moving object
If substrates are placed vertically on a support, then space utilization is improved, but temperature distribution uniformity deteriorates
Solution Approach 1:
The patent applies segmentation by dividing the substrate into multiple cooling zones (front surface, rear surface, and side edges) and providing dedicated inert gas suppliers for each zone. This segmented approach ensures uniform temperature distribution across the entire substrate by addressing the thermal needs of each region independently, even when substrates are vertically positioned to maximize space utilization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances cooling efficiency by shortening cooling times and reducing inert gas usage, while minimizing temperature gradients and particle re-attachment on substrates.
Implementation Method 1
a plurality of inert gas suppliers that supplies an inert gas in a direction along a surface of each of the plurality of substrates placed on the support
Data Source
AI summary
A technique is provided including: a housing constituting a standby chamber in which a plurality of substrates is caused to stand by; a support capable of placing each of the plurality of substrates in a vertical direction inside the housing; and a plurality of inert gas suppliers that supplies an inert gas in a direction along a surface of each of the plurality of substrates placed on the support, in which at least one of the plurality of inert gas suppliers supplies the inert gas toward each of the plurality of substrates from a direction different from a direction of another inert gas supplier.