Static Electricity Removing Member for Treatment Liquid Supply
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Solution Overview
Problem
Static electricity generated in treatment liquids during circulation can damage substrates or cause contamination during semiconductor manufacturing processes, as it may lead to sparks when supplied to the substrates.
Innovation Solution
A treatment liquid supply unit with a static electricity removing member, typically a conductive body made of a resin and carbon composite, is immersed in the treatment liquid or integrated into the circulation and supply lines, ensuring the body is grounded to dissipate static electricity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If treatment liquid circulates through the pipe connected to the tank, then the treatment liquid can be supplied to the substrate, but static electricity is generated due to friction and contained in the treatment liquid
Solution Approach 1:
A static electricity removing member is introduced as an intermediary component in the treatment liquid circulation system. This member removes static electricity from the treatment liquid through electrical conduction, preventing the harmful static electricity from being supplied to the substrate while maintaining the treatment liquid supply function
Solution Approach 2:
The static electricity that is generated during treatment liquid circulation is converted from a harmful factor into a removable electrical charge. By providing a conductive path through the static electricity removing member, the accumulated static electricity is discharged harmlessly, transforming the problematic friction-generated charge into a controlled electrical conduction process
2Reliability
If treatment liquid containing static electricity is supplied to the substrate, then the cleaning process can be performed, but the substrate may be damaged due to a spark or contaminated
Solution Approach 1:
Static electricity is removed from the treatment liquid in advance, before it is supplied to the substrate. The static electricity removing member is positioned in the circulation line or tank to pre-treat the liquid, ensuring that no static electricity reaches the substrate during the cleaning process
Solution Approach 2:
The static electricity removing member acts as a protective intermediary between the treatment liquid circulation system and the substrate. It eliminates the harmful static electricity component while allowing the beneficial treatment liquid to reach the substrate for cleaning
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes static electricity from the treatment liquid, preventing sparks and substrate damage, while maintaining optimal carbon content to enhance conductivity without compromising the material's integrity.
Implementation Method 1
a static electricity removing member that removes static electricity from the treatment liquid
Implementation Method 2
the body may be grounded
Implementation Method 3
static electricity due to friction is generated, and the static electricity is contained in the treatment liquid in the tank
Data Source
AI summary
Disclosed is an apparatus for treating a substrate. The apparatus includes a support unit that supports the substrate, and a treatment liquid supply unit that supplies a treatment liquid to the substrate, and the treatment liquid supply unit includes an injection unit that supplies the treatment liquid to the substrate supported by the support unit, a tank that accommodates the treatment liquid, a pipe connected to the tank, and a static electricity removing member that removes static electricity from the treatment liquid.