Substrate-Matching Probe for Static Electricity Inspection
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Solution Overview
Problem
During the manufacturing of substrates for flat panel displays, static electricity generated during fluid treatment processes can lead to defects in the final product, and existing methods lack effective means to accurately measure and control this static electricity.
Innovation Solution
An apparatus and method utilizing probes with conductive contact surfaces, connected to measurement units and control systems, to accurately measure static electricity and adjust process conditions based on reference values, ensuring the substrate is inspected and treated effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a probe with substantially the same shape as the substrate is used to measure static electricity, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent applies the copying principle by creating a probe that replicates the substrate's shape and surface characteristics. The probe is designed with substantially the same shape as the substrate being inspected, including similar surface area and geometric features. This copying approach allows the probe to experience the same static electricity generation conditions as the actual substrate, thereby improving measurement precision without requiring complex additional sensing components.
Solution Approach 2:
The patent applies segmentation by dividing the measurement system into separate functional components: the probe (which experiences static electricity), the wiring (which conducts the signal), and the measurement unit (which processes the data). This segmentation allows each component to be optimized independently - the probe for shape accuracy, the wiring for electrical conductivity, and the measurement unit for data processing capability - while collectively solving the measurement precision problem.
2Measurement precision
If multiple sub probes are used to cover the substrate area, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the measurement system into separate functional components: the probe (which experiences static electricity), the wiring (which conducts the signal), and the measurement unit (which processes the data). This segmentation allows each component to be optimized independently - the probe for shape accuracy, the wiring for electrical conductivity, and the measurement unit for data processing capability - while collectively solving the measurement precision problem.
Solution Approach 2:
The patent applies segmentation by dividing the probe into multiple sub-probes that can be independently positioned and measured. Each sub-probe can be connected to separate wirings and measurement points, allowing the system to measure static electricity at different locations across the substrate surface. This segmentation enables comprehensive coverage of the substrate area while maintaining manageable complexity through modular design.
3Ease of operation
If a mesh-type probe with holes is used, then ease of operation is improved, but measurement precision may deteriorate
Solution Approach 1:
The patent applies local quality by having different regions of the probe serve different functions. The outer surface of the probe (where it contacts the substrate or fluid) is designed with specific properties to experience static electricity generation, while the inner structure (including holes) is designed for operational ease and structural integrity. The mesh-type structure with holes allows the probe to be lightweight and easy to handle while the remaining material provides sufficient conductive path for measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables precise measurement and control of static electricity, reducing its adverse effects on substrates during manufacturing, thereby improving the quality and reliability of flat panel displays.
Implementation Method 1
static electricity generated during fluid treatment processes can lead to defects in the final product
Implementation Method 2
a wiring connected to the contact surface of the probe and delivering static electricity collected by the probe
Implementation Method 3
a measurement unit connected to the wiring, the measurement unit receiving the static electricity from the wiring and analyzing an intensity of the static electricity
Data Source
AI summary
An apparatus for inspecting static electricity of a substrate includes a probe having substantially a same shape as a substrate to be inspected, the probe including a contact surface made of a conductive material, a wiring connected to the contact surface of the probe and delivering static electricity collected by the probe, and a measurement unit connected to the wiring, the measurement unit receiving the static electricity from the wiring and analyzing an intensity of the static electricity.