Static Electricity and Temperature Visualization Device
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Solution Overview
Problem
There is a need for an efficient and accurate device capable of simultaneously measuring the amount of static electricity and temperature in substrate processing liquid storage modules, pipes, or cleaning devices, as existing methods are inadequate for predicting temperature and detecting static electricity errors in semiconductor manufacturing processes.
Innovation Solution
A device comprising a photographing unit, static electricity sensor, thermal imaging camera, processor, and output unit that generates a visualization image combining temperature and static electricity measurements, using a stitching algorithm to create a comprehensive image with color-coded data for easy interpretation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a stereo camera and thermal imaging camera are used to measure static electricity and temperature, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent combines a stereo camera system and a thermal imaging camera into a single integrated measurement device. The stereo camera captures visual information for spatial positioning, while the thermal imaging camera simultaneously measures temperature distribution. By merging these two measurement systems into one device, the patent achieves comprehensive measurement of static electricity location and temperature with high precision while avoiding the complexity of using completely separate measurement systems.
Solution Approach 2:
The measurement device is designed to perform multiple functions simultaneously: it detects static electricity discharge locations using the stereo camera, measures temperature distribution using the thermal imaging camera, and processes this data to generate comprehensive visualization. This multi-functional design allows a single device to replace what would otherwise require separate specialized instruments, improving measurement precision across multiple parameters while managing device complexity through integrated architecture.
2Productivity
If multiple sensors and cameras are integrated to simultaneously measure static electricity and temperature, then productivity is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple measurement functions into a single integrated device that can simultaneously detect static electricity discharge locations and measure temperature distribution. This consolidation allows for concurrent measurement of multiple parameters without requiring separate measurement campaigns or instruments, thereby improving productivity by reducing total measurement time while managing complexity through unified system architecture.
Solution Approach 2:
The device performs preliminary measurement of both static electricity and temperature simultaneously before processing begins. By capturing all necessary measurement data in advance through the integrated sensor system, the patent eliminates the need for sequential measurements or repeated instrument deployments, thus improving productivity while the integrated design keeps complexity manageable.
3Measurement precision
If a stitching algorithm is used to generate an entire image from multiple partial images, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The stereo camera and thermal imaging camera simultaneously capture multiple partial images of the measurement target from different angles and positions. By performing this comprehensive image capture in advance, the patent ensures that all necessary visual and thermal data are obtained before the stitching process begins, improving measurement precision through complete spatial coverage while minimizing time loss by avoiding sequential data collection.
Solution Approach 2:
The system captures more partial images than the minimum required for complete coverage, using the stereo camera to photograph multiple areas of the measurement target. This excessive action approach ensures that sufficient overlapping data is available for accurate stitching and processing, improving measurement precision by providing redundant information for better spatial reconstruction, while the parallel capture approach minimizes the time penalty.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device provides accurate and efficient visualization of static electricity and temperature levels, enabling precise error detection and reducing processing time by allowing for targeted adjustments in substrate processing liquid heating.
Implementation Method 1
a thermal imaging camera configured to measure temperature levels of a plurality of areas of the measurement target
Implementation Method 2
a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target
Data Source
AI summary
Provided is a device for visualizing a temperature and an amount of static electricity, wherein the device is arranged adjacent to a substrate processing liquid providing unit including a pipe to provide a passage through which a substrate processing liquid is transferred and a processing liquid storage module for storing the substrate processing liquid, the device including a photographing unit configured to generate a plurality of partially captured images by photographing a plurality of areas of a measurement target, a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target, a thermal imaging camera configured to measure temperatures of the plurality of areas of the measurement target, a processor configured to generate an entire image by combining the plurality of partially captured images with each other, and an output unit configured to output a visualization image.