Static Electricity Visualization on Semiconductor Substrates
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Solution Overview
Problem
Static electricity accumulation on insulator substrates during semiconductor manufacturing leads to particle defects and potential device destruction, necessitating effective measurement and control of static electricity levels.
Innovation Solution
A static electricity visualization apparatus comprising a photographing unit, static electricity sensor, processor, and output unit that generates a visualization image by matching a second photographed image with a first photographed image, displaying static electricity levels on the first image using colors corresponding to measured levels, with a distance sensor ensuring accurate data provision when the distance is within a threshold value.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If static electricity measurement is performed using conventional sensors, then static electricity levels can be measured, but visual identification and spatial distribution mapping of static electricity on substrates is difficult
Solution Approach 1:
The patent applies color-coded visualization to represent different static electricity levels on substrate surfaces. The processing unit maps measured static electricity values to color gradients, where different colors indicate different voltage levels. This allows operators to visually identify high-risk areas and understand the spatial distribution of static electricity across the substrate, transforming invisible electrical data into intuitive visual information.
Solution Approach 2:
The patent creates a visual copy or representation of the substrate's static electricity distribution through generated images. The system captures the electrical state of the substrate and produces a duplicate visual representation where color patterns correspond to voltage levels. This copied visual information preserves spatial relationships and enables easy analysis of static electricity patterns without directly observing the actual substrate.
2Area of stationary object
If multiple sensors are used to capture comprehensive static electricity data across the substrate, then measurement coverage is improved, but device complexity increases
Solution Approach 1:
The patent divides the substrate measurement area into multiple regions or zones that are sequentially or simultaneously monitored. Instead of using one complex sensor to cover the entire area, the system segments the measurement task across multiple sensor positions or time steps. Each sensor captures data for a specific region, and the processing unit integrates these segmented measurements into a complete spatial map, reducing individual sensor complexity while maintaining comprehensive coverage.
3Reliability
If real-time static electricity monitoring is implemented to prevent device damage, then reliability is improved, but processing time and computational resources increase
Solution Approach 1:
The patent establishes predetermined thresholds and alert conditions for static electricity levels before actual manufacturing operations begin. The system pre-configures safe voltage limits and warning levels, allowing it to quickly compare real-time measurements against these pre-set criteria without requiring complex real-time analysis. This preliminary preparation enables rapid decision-making and immediate protective actions when thresholds are exceeded, reducing processing delays while maintaining high reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables visual identification and measurement of static electricity levels on substrates, preventing device damage by providing a clear representation of static electricity distribution, thereby improving manufacturing yield and control.
Implementation Method 1
Static electricity is formed when electric charges generated by electric charging are accumulated without being discharged due to the large resistance of the surface of the charged object
Implementation Method 2
a photographing unit for generating a first photographed image obtained by photographing a measurement target at a first distance from the measurement target in a first mode
Data Source
AI summary
A static electricity visualization apparatus capable of visually identifying a measured level of static electricity is provided. The static electricity visualization apparatus comprises a photographing unit for generating a first photographed image obtained by photographing a measurement target at a first distance from the measurement target in a first mode, and generating a second photographed image obtained by photographing the measurement target at a second distance from the measurement target in a second mode, a static electricity sensor for measuring a static electricity level of the measurement target at the second distance from the measurement target, a processor for matching the second photographed image with the first photographed image, and an output unit for outputting a static electricity visualization image that visualizes a static electricity level measured by the static electricity sensor on the first photographed image, wherein the static electricity visualization image comprises a color corresponding to the static electricity level of the measurement target measured by the static electricity sensor at a position where the second photographed image matches on the first photographed image.