Static Electricity Visualization System for Semiconductor Substrates
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Solution Overview
Problem
Static electricity accumulation on substrates during semiconductor manufacturing poses a significant challenge, leading to particle defects and potential device destruction, necessitating effective measurement and control methods.
Innovation Solution
A static electricity visualization system comprising a measuring unit, a photographing unit, a processor, and an output unit, which measures static electricity levels, generates a photographed image, recognizes marks on the image, and outputs a visualization image displaying static electricity levels in corresponding colors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If static electricity measurement is performed using traditional measurement devices, then the static electricity level can be measured, but the measurement results cannot be visually confirmed and are difficult to interpret
Solution Approach 1:
The patent applies color changes by mapping static electricity level data to color values on a color map. Different static electricity levels are represented by different colors, allowing operators to visually interpret the magnitude and distribution of static electricity across the substrate. This transforms abstract numerical measurements into intuitive visual information that can be quickly understood.
Solution Approach 2:
The patent adds a visual dimension to static electricity measurement by generating an image that displays static electricity levels across the substrate surface. Instead of仅提供 numerical data, the system creates a two-dimensional visual representation where color variations correspond to different static electricity levels, enabling spatial understanding of charge distribution.
2Measurement precision
If detailed static electricity data is collected across the substrate, then comprehensive measurement information is obtained, but the data becomes complex and difficult to interpret
Solution Approach 1:
The patent creates a visual copy or representation of the static electricity distribution on the substrate by generating an image that mirrors the actual charge patterns. This visual copy allows operators to understand complex measurement data through an intuitive graphical representation without needing to analyze raw numerical data directly.
Solution Approach 2:
The system uses color mapping to simplify complex static electricity data. By assigning colors to different voltage levels according to a color map, the patent transforms complex numerical datasets into an easily interpretable visual format where color intensity and hue indicate the magnitude and distribution of static electricity.
3Productivity
If static electricity levels are monitored continuously, then real-time control is enabled, but the system complexity and processing requirements increase
Solution Approach 1:
The patent implements feedback by continuously monitoring static electricity levels and immediately visualizing them through color-coded images. This real-time feedback loop allows operators to observe static electricity changes as they occur and take corrective actions promptly, enabling proactive control to prevent particle defects and device damage.
Solution Approach 2:
The system adds a visual dimension to continuous monitoring data by generating real-time images that display static electricity distribution. This visual representation simplifies the interpretation of continuous measurement data, allowing operators to quickly assess substrate conditions without analyzing complex numerical datasets in real-time.
Data Source
AI summary
A static electricity visualization system capable of visually confirming the level of the measured static electricity is provided. The static electricity visualization system comprises a first measuring unit for measuring a static electricity level detected at a first position of a measurement target and comprising a first mark, a photographing unit for generating a photographed image by photographing the measurement target, a processor for recognizing a first mark in the photographed image and calculating coordinates of the first mark on the photographed image, and an output unit for outputting a static electricity visualization image that visualizes the static electricity level measured by the first measuring unit in a first mode, wherein the static electricity visualization image comprises a color corresponding to a level of static electricity measured by the first measuring unit on the coordinates of the first mark of the photographed image.