Static Foil Trap Pressurization for EUV Debris Capture
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Solution Overview
Problem
Existing EUV light source apparatuses face challenges in effectively capturing fast-moving debris such as particles and ions released from plasma, which can contaminate or damage optical elements in utilization equipment.
Innovation Solution
A debris mitigation device incorporating a static foil trap with a pressure-increasing mechanism and transparent gas flow to enhance debris capture, combined with a rotary foil trap to improve the probability of capturing debris.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a static foil trap is used to capture debris, then the structure is simple, but the capture efficiency of fast-moving debris is insufficient
Solution Approach 1:
The patent introduces a pressure-increasing mechanism that supplies gas to increase the pressure inside the static foil trap. This pneumatic approach enhances the trap's ability to capture fast-moving debris by creating a denser medium that increases collision probability, thereby improving capture efficiency without requiring complex mechanical moving parts
Solution Approach 2:
The patent changes the pressure parameter inside the static foil trap by introducing a pressure-increasing mechanism. By increasing the pressure, the density of the gas medium increases, which enhances the capture efficiency of fast-moving debris through increased collision frequency, thus improving performance through parameter optimization rather than structural complexity
2Stress or pressure
If the opening area of incident/emission openings is reduced to increase pressure, then the pressure increases, but the light transmission may be affected
Solution Approach 1:
The patent segments the opening areas by introducing incident-side and emission-side members that selectively reduce opening areas at specific locations. This segmentation allows pressure increase in the internal space while maintaining sufficient light transmission paths, as the members are positioned and sized to balance pressure requirements with optical transmission needs
Solution Approach 2:
The incident-side and emission-side members create local quality changes by reducing opening areas only at specific locations rather than uniformly across the entire structure. This localized approach allows pressure to be increased in the internal space while preserving light transmission efficiency in critical areas, resolving the contradiction between pressure and light transmission
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device significantly enhances the capture efficiency of debris, reducing contamination and damage to optical elements by increasing the probability of capturing fast-moving particles and ions.
Implementation Method 1
a pressure-increasing mechanism that increases a pressure of the internal space
Implementation Method 2
an inlet hole configured to be communicated with the internal space in the enclosure section, and allow a transparent gas transparent to the light to flow into the enclosure section
Implementation Method 3
The plurality of foils is fixed in an area of the internal space in which the light travels... significantly enhances the capture efficiency of debris
Data Source
AI summary
A debris mitigation device includes a static foil trap. The static foil trap includes an enclosure section, a plurality of foils, an inlet hole, and a pressure-increasing mechanism. The enclosure section includes an incident opening where light emitted from the light source enters, an emission opening where the light is emitted, and an internal space where the light travels. The foils are fixed in an area of the internal space. The inlet hole is configured to be communicated with the internal space, and allow a transparent gas transparent to the light to flow into the internal space. The pressure-increasing mechanism includes at least one of an incident-side member and an emission-side member disposed at the incident opening and the emission opening, respectively, in a manner that opening areas thereof are reduced without blocking a traveling of the light, and increases a pressure of the internal space.