Static Electricity Remover for Mask-Substrate Separation
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Solution Overview
Problem
Static electricity generated between a substrate and a mask during the manufacturing of organic light-emitting display devices causes adhesion issues, leading to damage and improper separation of the mask and substrate, which affects the deposition process and the quality of the thin film.
Innovation Solution
A thin film deposition apparatus equipped with a static electricity remover that supplies a current to the mask at a predetermined frequency, using a power source and resistor to form a closed circuit, effectively neutralizing static electricity and preventing adhesion between the substrate and mask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask is disposed to closely contact a substrate for thin film deposition, then deposition precision is improved, but static electricity causes adhesion between mask and substrate leading to separation failure
Solution Approach 1:
The patent applies preliminary anti-action by introducing a static electricity remover that actively eliminates static charge buildup between the mask and substrate before adhesion problems occur. The device includes a ground connection and discharge mechanism that continuously removes static electricity during the deposition process, preventing the electrostatic attraction that would otherwise cause mask-substrate adhesion and separation failure.
2Productivity
If static electricity is not removed, then the deposition process can proceed, but mask and substrate cannot be properly separated causing damage
Solution Approach 1:
The patent converts the harmful static electricity into a beneficial controlled discharge process. By providing a ground connection and static electricity remover, the system safely dissipates static charge through a controlled path, transforming the potentially damaging electrostatic force into a harmless grounding current that protects both the mask and substrate while maintaining deposition efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents substrate damage and ensures proper separation of the mask and substrate, maintaining the integrity of the thin film deposition process and enhancing the manufacturing efficiency of organic light-emitting display devices.
Implementation Method 1
static electricity generated between a substrate and a mask
Implementation Method 2
supplying a current to the mask... constitute a closed circuit
Data Source
AI summary
A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.