Stationary Vibration Isolation Damper with Variable Viscosity Fluid
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Solution Overview
Problem
Vibration isolation systems in the semiconductor industry, particularly for lithography apparatus, face challenges in compensating for forces generated by the moving mass of the anti-vibration mounted load, leading to increased complexity and requirements for larger actuators as equipment size grows, with existing solutions like pneumatic springs being limited to vertical directions and exhibiting delayed response behaviors.
Innovation Solution
A stationary vibration isolation system using a damper with a fluid of variable viscosity, such as non-Newtonian, electrorheological, or magnetorheological fluids, to absorb and divert forces from the anti-vibration mounted load to the base, providing increased damping during rapid movements and reducing the need for extensive actuator adaptation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If actuators are used to counteract vibrations caused by the anti-vibration mounted load, then vibration compensation is achieved, but the complexity and size of actuators must increase as equipment size grows
Solution Approach 1:
The system divides the vibration compensation function into two independent parts: dampers handle the counteraction of forces generated by the anti-vibration mounted load, while actuators focus solely on compensating environmental vibrations. This segmentation allows each component to be optimized for its specific function, reducing overall system complexity.
Solution Approach 2:
The dampers provide partial vibration compensation by counteracting a portion of the forces generated by the anti-vibration mounted load, specifically the forces that would otherwise require actuators to handle. This partial action reduces the burden on actuators, allowing for simpler and smaller actuator design.
2Force
If pneumatic springs are used to provide counteracting forces, then vertical direction support is improved, but response time is delayed for fast motions
Solution Approach 1:
The system replaces the valve-controlled pneumatic spring mechanism with a direct mechanical damper connection. This substitution eliminates the delayed response caused by valve actuation, providing immediate mechanical response to fast motions while maintaining the ability to provide counteracting forces.
Solution Approach 2:
The damper is designed with variable damping characteristics that can adapt to different motion conditions. During fast motions, the damper provides low damping to allow rapid response, while during slower vibrations, it provides higher damping for effective force counteraction. This dynamic behavior resolves the contradiction between response speed and force provision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively compensates for forces generated by the anti-vibration mounted load without requiring significant increases in actuator force, allowing for simpler system configuration and operation, particularly by leveraging the viscosity changes in fluids to enhance damping and reduce undesirable vibrations.
Implementation Method 1
the anti-vibration mounted load is coupled to the base via a damper which is effective at least in horizontal direction and which comprises a fluid of variable viscosity
Implementation Method 2
By using a fluid of variable viscosity, a mechanical coupling of the anti-vibration mounted load and the base may be induced temporarily. In this manner, in particular force impacts of displaceable tables can be diverted to the base.
Implementation Method 3
an electrorheological or magnetorheological fluid may be used as the fluid
Implementation Method 4
an electrorheological or magnetorheological fluid may be used as the fluid
Data Source
AI summary
The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.