Stator Disk Segmentation for Turbomolecular Pump Precision

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Solution Overview

Problem

The existing manufacturing methods for stator disks in turbomolecular pumps, such as milling or punching from solid disks, are time-consuming and expensive, leading to high material deformation, stress, and reduced accuracy, which affects the pump's performance due to large gap dimensions between components.

Innovation Solution

A stator disk design featuring an inner ring, outer ring, and blades with webs in the radial direction, where the web depth is less than the blade depth, reducing material deformation and stress, allowing for cheaper tooling and improved precision, achieved through a manufacturing process involving semicircular disks with radial slots and additional circumferential slots to form blades.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If stamped discs with radial slits are used to reduce production time and cost, then productivity improves, but manufacturing precision deteriorates due to high deformation and stress at connection points

Engineering Contradiction:
Improveproduction timeVSAvoidshape accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent introduces circumferential slots that divide the blade-root connection area into multiple smaller web sections. This segmentation reduces the deformation zone in each section and allows stress to be distributed more evenly, preventing the high localized stresses that cause warping while maintaining the efficiency of the stamped disc process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different structural characteristics to different regions of the disc. The blade areas maintain full depth for pumping efficiency, while the root connection areas incorporate circumferential slots creating thinner webs that reduce deformation. This local differentiation allows each region to be optimized for its specific function while avoiding the trade-off between productivity and precision.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If high deformation is applied to form blades from stamped discs, then the blade shape is achieved, but manufacturing precision deteriorates due to material stress and warping

Engineering Contradiction:
Improveblade formingVSAvoiddisc flatness
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

By introducing circumferential slots that divide the blade-root connection area into multiple smaller web sections, the patent reduces the deformation zone in each section. This segmentation allows the blade forming process to proceed with lower overall deformation requirements, as each small web section can be formed independently with less stress accumulation, thereby maintaining disc flatness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies deformation only where necessary - the blades are formed with sufficient depth for pumping efficiency, while the root connection areas incorporate circumferential slots that reduce deformation to the minimum required level. This partial action approach achieves the necessary blade geometry without applying excessive deformation that would cause warping.

Inventive Principle:
Principle #16Partial or excessive action

3Manufacturing precision

If complex tools are used to achieve precise stator disc shapes, then manufacturing precision improves, but device complexity increases

Engineering Contradiction:
Improvecomponent accuracyVSAvoidtool complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The circumferential slots create a segmented structure that can be formed using simpler stamping tools compared to the complex forming tools required for traditional solid disc machining. The slots divide the complex blade-root geometry into smaller, more manageable sections that can be formed with less complex tooling, reducing both device complexity and tool cost while maintaining precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the structural parameters of the disc by introducing circumferential slots, which fundamentally alters the forming process requirements. Instead of requiring complex tools to form and control deformation in large continuous areas, the modified parameters (slotted structure) enable the use of simpler tools that can form smaller discrete web sections, thereby reducing device complexity while achieving high precision.

Inventive Principle:
Principle #35Parameter changes

4Manufacturing precision

If small gap dimensions are achieved through high precision stator discs, then pump performance improves, but manufacturing cost increases due to expensive tools and straightening operations

Engineering Contradiction:
Improvegap dimension accuracyVSAvoidproduction cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The circumferential slots segment the blade-root connection areas, which reduces the deformation required to form the blades and eliminates the need for post-forming straightening operations. This segmentation allows high precision gap dimensions to be achieved directly during the stamping process itself, without requiring expensive straightening equipment or additional processing steps, thereby reducing manufacturing cost while maintaining high precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent extracts the problematic high-stress deformation zones by introducing circumferential slots that remove material from the blade-root connection areas. This extraction of material creates thinner webs that require significantly less deformation to form, eliminating the need for expensive straightening operations and reducing tooling costs, while still achieving the precise gap dimensions necessary for optimal pump performance.

Inventive Principle:
Principle #2Taking out (Extraction)

Data Source

PatentEP1731766B1Stator disc for turbomolecular pump
Publication Date: 2012.03.28 PFEIFFER VACUUM GMBH
  • EP1731766B1 patent drawingFigure 1
  • EP1731766B1 patent drawingFigure 2
  • EP1731766B1 patent drawingFigure 3

AI summary

The disc has a set of vanes (2) exposed in a stator disc plane, an inner ring and an outer ring, where the stator disc is divided into two identical disk sections. A connecting position is provided between the vanes and rings. The vane has a radial rod at the connecting position, where the width of the radial rod along the circumference is smaller than the vane width. The radial rod is arranged between the vane edges. An independent claim is also included for a method for manufacturing a stator disc.