Stator Tile Segmentation for Multi-Stage Displacement Control
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Solution Overview
Problem
Existing displacement devices face challenges in controllably moving multiple moveable stages relative to a stator due to cross-coupling forces, which affect the efficient movement and positioning of stages in manufacturing and inspection processes.
Innovation Solution
The system employs a stator with independently addressable coil trace groups and moveable stages equipped with magnetization elements, where controllers and amplifiers manage currents in the coil traces to create magnetic forces that control the movement of stages, minimizing cross-coupling by optimizing the layout and orientation of magnet arrays and coil traces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple moveable stages are moved in a displacement device, then productivity and efficiency are improved, but cross-coupling forces between stages increase causing control difficulty
Solution Approach 1:
The stator is divided into multiple independently addressable coil trace groups, where each group can be controlled separately to move specific moveable stages. This segmentation allows independent control of each stage while maintaining the ability to move multiple stages simultaneously, resolving the contradiction between productivity improvement and control difficulty caused by cross-coupling forces.
2Adaptability or versatility
If coil traces are arranged to move multiple moveable stages, then the ability to control multiple stages is improved, but cross-coupling forces between stages worsen
Solution Approach 1:
The coil traces are configured with specific local characteristics - each coil trace group is designed to generate magnetic forces primarily in a specific direction and location. By optimizing the local quality of each coil trace group's magnetic field generation, the system achieves versatile control of multiple stages while minimizing unwanted cross-coupling forces between adjacent stages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise and efficient movement of multiple stages with reduced cross-coupling forces, allowing for independent control of each stage's position and orientation in six degrees of freedom, enhancing the efficiency and accuracy of displacement devices in manufacturing and inspection processes.
Implementation Method 1
controllers and amplifiers manage currents in the coil traces to create magnetic forces that control the movement of stages
Implementation Method 2
employ a stator with independently addressable coil trace groups and moveable stages equipped with magnetization elements, where controllers and amplifiers manage currents in the coil traces to create magnetic forces that control the movement of stages
Data Source
Figure 1A
Figure 1B
Figure 2~4
AI summary
Aspects of the invention provide methods and systems for moving moveable stages relative to a stator. A stator is operationally divided into multiple stator tiles. The movement of the one or more moveable stages is controlled by a plurality of controllers (each assigned particular control responsibilities). A controller is provided for each stator sector, where each stator sector comprises a group of one or more stator tiles. Controllers from neighboring sectors share various information to facilitate controllable movement of one or more moveable stages relative to the stator.