Stator Vane Gap Design for Turbo Molecular Pump
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Solution Overview
Problem
The existing construction of stator vanes in turbo molecular pumps, where two semi-ring shaped halves are abutted to form a ring, often results in manufacturing variations leading to inner rim end collisions or warping, which narrows the interval between stator and rotor vanes, causing breakage due to the inability to visually check the inner rim end positioning.
Innovation Solution
The stator vane is designed with a gap at the abutment portion of the inner rim portion, formed by making one end of the inner rim end shorter in the circumferential direction, preventing overlap or warping when the halves are abutted, and this gap is set between 0.3 mm to 0.7 mm, preferably 0.5 mm, to ensure proper alignment and reduce breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If two stator vane halves are abutted to form a ring-shaped stator vane, then the stator vane can be manufactured cost-effectively and assembled around the rotor, but manufacturing variations cause inner rim end collisions or warping that cannot be visually detected, leading to stator blade breakage
Solution Approach 1:
The patent applies preliminary action by pre-forming a gap at the inner rim end of each stator vane half before assembly. This gap is intentionally created during manufacturing to prevent future collisions or warping when the halves are abutted together. The gap serves as a preventive measure that eliminates the root cause of reliability issues before assembly occurs, allowing the cost-effective two-half construction to proceed without risking blade breakage.
Solution Approach 2:
The gap at the inner rim end acts as an intermediary element between the two stator vane halves. Instead of allowing direct contact between the inner rim ends (which causes collisions and warping), the gap provides a buffer zone that accommodates manufacturing variations. This intermediary space prevents harmful interactions while maintaining the overall structural integrity and cost advantages of the segmented design.
2Productivity
If the inner rim end positioning is not visually checkable during assembly, then the assembly process is simplified and faster, but positioning accuracy deteriorates leading to overlap or warping of inner rim ends
Solution Approach 1:
The patent resolves this contradiction by performing preliminary action during the manufacturing stage rather than during assembly. The gap is pre-formed at the inner rim end before the halves are joined. This ensures that when assembly occurs quickly without visual checking of inner rim positioning, the pre-established gap already prevents overlap or warping. The precision is built into the component itself rather than relying on assembly verification.
Solution Approach 2:
The stator vane half is designed to be self-sufficient with the gap already incorporated into its structure. When two halves are abutted, each half's pre-formed gap automatically prevents collision with the other half's inner rim end. This self-service design eliminates the need for external verification or adjustment during assembly, maintaining both high productivity and precision without requiring visual checking of the inner rim positioning.
Data Source
AI summary
A stator vane for a turbo molecular pump has stator vane halves each having inner and outer rim portions and radially arranged stator blades connected integrally between the inner and outer rim portions. The inner rim portion of each stator vane half has a pair of inner rim ends and the outer rim portion of each stator vane half has a pair of outer rim ends. The stator vane halves are disposed in abutment with one another along an abutment line to form an annular body with the inner rim ends of one of the stator vane halves being disposed in confronting relation with the respective inner rim ends of the other of the stator vane halves and with the outer rim ends of the one of the stator vane halves being disposed in confronting relation with the respective outer rim ends of the other of the stator vane halves. At least each of the inner rim ends or each of the outer rim ends of one of the two stator blade halves being formed shorter in a circumferential direction of the annular body with respect to the abutment line to form a gap between the confronting inner rim ends or the confronting outer rim ends.


