Steam Buffer Volume for Instant Vapor Supply in Batch Processes
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Solution Overview
Problem
Existing methods for providing steam in industrial processes, such as semiconductor and solar cell manufacturing, face challenges with intermittent demand, leading to material loss and transient processes due to continuous steam generation and bypass systems.
Innovation Solution
A method involving continuous steam generation and storage in a controllable buffer volume, allowing pressure increase during interruptions, enabling instantaneous steam supply with well-defined properties and minimizing material loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If steam is generated continuously and discharged via bypass during interruption phases, then steam supply for discontinuous processes is maintained, but material loss increases
Solution Approach 1:
The storage volume accumulates steam in advance during interruption phases when no steam is required by the process area. This preliminary accumulation allows the system to have steam ready for immediate delivery when the process resumes, eliminating the need for continuous bypass discharge and preventing material loss while maintaining productivity.
2Loss of substance
If a modulation device is heated to evaporate condensed vapor, then material loss is minimized, but transient process occurs during changeover
Solution Approach 1:
Steam is pre-generated and stored in the storage volume during interruption phases before it is needed. This preliminary action ensures that when the process area requires steam again, it is immediately available from the storage volume without requiring a transient heating and evaporation process, thus eliminating time loss while maintaining material efficiency.
Solution Approach 2:
The storage volume acts as an intermediary between the direct evaporator and the process area. It decouples the continuous steam generation from the discontinuous steam demand, allowing the evaporator to operate continuously while the process area receives steam only when needed, eliminating both material loss and transient processes.
3Stability of the object's composition
If steam is generated continuously, then steady-state conditions are maintained, but response time to intermittent demand increases
Solution Approach 1:
The system pre-generates and stores steam in the storage volume during periods when the process area does not require steam. This preliminary preparation ensures that when demand arises, steam is immediately available, achieving both stable steam properties through continuous generation and rapid response time through pre-positioned inventory.
Solution Approach 2:
The storage volume serves as a buffer that decouples the continuous steam generation process from the discontinuous demand pattern. This intermediary allows the evaporator to maintain steady-state operation for stable steam properties while the storage volume provides rapid response to intermittent demand without requiring the evaporator to adjust its operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient, flexible, and rapid steam supply with no material loss, reducing the transient phase and enabling quick startup of processes with stable pressure conditions.
Implementation Method 1
evaporating a liquid in a direct evaporator to generate a vapor
Implementation Method 2
steam continues to be produced at least temporarily and is transported into the storage volume, so that the pressure within the storage volume increases during the interruption
Data Source
Figure 1
AI summary
The present invention relates to a process and a device for providing vapor for a discontinuous process.