Steam Buffer Volume for Instant Vapor Supply in Batch Processes

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for providing steam in industrial processes, such as semiconductor and solar cell manufacturing, face challenges with intermittent demand, leading to material loss and transient processes due to continuous steam generation and bypass systems.

Innovation Solution

A method involving continuous steam generation and storage in a controllable buffer volume, allowing pressure increase during interruptions, enabling instantaneous steam supply with well-defined properties and minimizing material loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If steam is generated continuously and discharged via bypass during interruption phases, then steam supply for discontinuous processes is maintained, but material loss increases

Engineering Contradiction:
Improvesteam supply continuityVSAvoidmaterial loss
Core Design Contradiction:
ProductivityVSLoss of substance

Solution Approach 1:

The storage volume accumulates steam in advance during interruption phases when no steam is required by the process area. This preliminary accumulation allows the system to have steam ready for immediate delivery when the process resumes, eliminating the need for continuous bypass discharge and preventing material loss while maintaining productivity.

Inventive Principle:
Principle #10Preliminary action

2Loss of substance

If a modulation device is heated to evaporate condensed vapor, then material loss is minimized, but transient process occurs during changeover

Engineering Contradiction:
Improvematerial lossVSAvoidtransient process duration
Core Design Contradiction:
Loss of substanceVSLoss of time

Solution Approach 1:

Steam is pre-generated and stored in the storage volume during interruption phases before it is needed. This preliminary action ensures that when the process area requires steam again, it is immediately available from the storage volume without requiring a transient heating and evaporation process, thus eliminating time loss while maintaining material efficiency.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The storage volume acts as an intermediary between the direct evaporator and the process area. It decouples the continuous steam generation from the discontinuous steam demand, allowing the evaporator to operate continuously while the process area receives steam only when needed, eliminating both material loss and transient processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If steam is generated continuously, then steady-state conditions are maintained, but response time to intermittent demand increases

Engineering Contradiction:
Improvesteam property stabilityVSAvoidresponse time
Core Design Contradiction:
Stability of the object's compositionVSSpeed

Solution Approach 1:

The system pre-generates and stores steam in the storage volume during periods when the process area does not require steam. This preliminary preparation ensures that when demand arises, steam is immediately available, achieving both stable steam properties through continuous generation and rapid response time through pre-positioned inventory.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The storage volume serves as a buffer that decouples the continuous steam generation process from the discontinuous demand pattern. This intermediary allows the evaporator to maintain steady-state operation for stable steam properties while the storage volume provides rapid response to intermittent demand without requiring the evaporator to adjust its operation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for efficient, flexible, and rapid steam supply with no material loss, reducing the transient phase and enabling quick startup of processes with stable pressure conditions.

Implementation Method 1

evaporating a liquid in a direct evaporator to generate a vapor

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

steam continues to be produced at least temporarily and is transported into the storage volume, so that the pressure within the storage volume increases during the interruption

Methodology Applied
Scientific EffectPressure increase: Pressure Increase

Data Source

PatentEP3810989B1Process and device for providing vapor
Publication Date: 2022.01.19 SINGULUS TECHNOLGIES AG
  • EP3810989B1 patent drawingFigure 1

AI summary

The present invention relates to a process and a device for providing vapor for a discontinuous process.