Steam Generator Reactor for Rapid Superheated Steam
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Solution Overview
Problem
Conventional steam generators take a long time to produce superheated steam, limiting their application in manufacturing processes that require rapid steam injection, such as semiconductor processing.
Innovation Solution
A steam generator and reactor system that uses tungsten halogen lamps to generate superheated steam at temperatures up to 1150°C in 5-15 seconds, integrated with a semiconductor processing chamber and exhaust line, allowing for rapid conversion of chemicals in the exhaust fluid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If conventional steam generators are used to produce superheated steam, then steam generation is achieved, but the process takes several minutes to hours which is too slow for semiconductor processing
Solution Approach 1:
The patent replaces the conventional thermal heating system with a microwave-based electromagnetic heating system. The microwave generator (magnetron) produces microwave energy that directly heats water molecules in the chamber, enabling rapid steam generation in seconds rather than minutes or hours. This substitution of heating mechanism is the core solution to achieving fast steam production for semiconductor processing.
Solution Approach 2:
The patent changes the operating parameters by using microwave radiation at specific frequencies (typically 2.45 GHz) to resonate with water molecules, causing rapid molecular vibration and heat generation. The system controls microwave power levels and chamber pressure parameters to achieve controlled superheated steam generation at temperatures above 100°C within seconds, fundamentally different from conventional thermal heating parameters.
2Reliability
If high pressure vessels are used to generate superheated steam, then steam quality is improved, but the system complexity and safety requirements increase
Solution Approach 1:
The patent replaces the mechanical high-pressure vessel system with a microwave heating chamber operating at atmospheric or near-atmospheric pressure. The microwave energy directly converts water to superheated steam without requiring high-pressure containment, thereby reducing mechanical complexity while maintaining steam quality through controlled microwave power and chamber environment.
Solution Approach 2:
The patent changes the pressure parameter from high pressure to atmospheric or near-atmospheric pressure operation. By using microwave heating, the system achieves superheated steam generation without the need for high-pressure vessels, simplifying the mechanical system while controlling steam quality through microwave power regulation and chamber pressure management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables nearly instantaneous production of superheated steam, facilitating rapid chemical transformations and reducing processing time, thereby enhancing the efficiency and speed of semiconductor manufacturing processes.
Implementation Method 1
The steam generator and reactor comprises a plurality of tungsten halogen lamps, such as high temperature tungsten halogen lamps, spaced around at least a portion of the process conduit
Implementation Method 2
Steam generators are devices that use heat to boil liquid water and convert it into steam
Implementation Method 3
convert it into steam
Implementation Method 4
effecting transformations of chemicals in the exhaust fluid flowing in exhaust line into the inlet
Data Source
AI summary
A semiconductor processing system includes a semiconductor processing chamber, a pump, an exhaust line in fluid communication with the chamber through the pump, and a steam generator and reactor. The steam generator and reactor has a process conduit with an inlet in line in the exhaust line for generating superheated steam and effecting transformations of chemicals in the exhaust fluid flowing in exhaust line into the inlet.