Hemitoroidal Resonator Layout for Precise Stem-Aligned Gyroscopes
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Solution Overview
Problem
Hemispherical type vibrating structure gyroscopes face challenges in achieving precision due to the uniformity of the hemispherical shell and the positioning of the stem, affecting the accuracy of rotation detection.
Innovation Solution
A hemitoroidal resonator with a stem and an outer lip is used, where the stem is integrally formed and aligned with high precision, allowing for improved vibratory characteristics and strength, and fabricated using micro-electro-mechanical systems (MEMS) techniques to enhance accuracy and batch fabrication capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If hemispherical shell is used with conventional machining techniques, then manufacturing is easier, but manufacturing precision and stem positioning accuracy deteriorate
Solution Approach 1:
The patent replaces conventional mechanical machining techniques with micromachining techniques to fabricate the hemispherical resonator. This substitution enables precise control of the resonator geometry and stem positioning at the micro-scale, achieving manufacturing precision that cannot be obtained through traditional machining methods while still allowing for practical fabrication.
Solution Approach 2:
The patent changes the fabrication parameters by adopting micromachining processes with specific dimensional tolerances and positioning accuracies. By controlling parameters such as shell thickness uniformity (within micrometers) and stem positioning accuracy (within micrometers from the center), the patent achieves the required manufacturing precision for high-performance gyroscopes.
2Ease of manufacture
If stem positioning is not precisely controlled, then manufacturing is easier, but gyroscope accuracy deteriorates
Solution Approach 1:
The patent implements preliminary positioning actions during the micromachining fabrication process. The stem position is predetermined and precisely established before final assembly, with the stem positioned at the exact center of the hemispherical shell within micrometer tolerances. This preliminary precision positioning ensures optimal vibratory characteristics and rotation detection accuracy without requiring complex post-fabrication adjustments.
3Ease of manufacture
If hemispherical shell uniformity is not precisely controlled, then manufacturing is easier, but vibration detection accuracy deteriorates
Solution Approach 1:
The patent changes the fabrication parameters by adopting micromachining processes that control shell thickness uniformity within micrometer tolerances. This precise parameter control ensures uniform vibratory modes and high-quality resonance characteristics, enabling accurate rotation detection through vibration analysis.
Solution Approach 2:
The patent utilizes pneumatic or hydraulic micromachining processes to achieve precise and uniform shell thickness. These controlled fluid-based machining methods allow for consistent material removal and uniform thickness distribution throughout the hemispherical shell, which is critical for maintaining uniform vibratory characteristics.
Data Source
AI summary
One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.


