STEM Microscope Single Detector Multi-Image Integration
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Solution Overview
Problem
Conventional scanning transmission electron microscopes require multiple detectors to produce various types of STEM images, which is inefficient and limits flexibility in image generation.
Innovation Solution
A scanning transmission electron microscope design that uses a single detector or imager to generate multiple types of STEM images by integrating signal intensities over different regions of the electron diffraction patterns, allowing for the production of bright-field, annular bright-field, differential phase contrast, and annular dark-field images using adjustable integration regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple detectors are used to produce various types of STEM images, then the ability to generate different image types is improved, but the device complexity and cost increase
Solution Approach 1:
The patent implements a single detector that can generate multiple types of STEM images (bright-field, annular bright-field, differential phase contrast, and annular dark-field) by varying the integration region parameters. This multi-functional approach allows one detector to replace what would traditionally require multiple specialized detectors, thereby reducing device complexity while maintaining versatility in image type generation
Solution Approach 2:
The patent changes the parameters of the integration region (size, shape, and position) to generate different types of STEM images from a single detector. By adjusting these parameters dynamically, the system can produce various image types without requiring physical reconfiguration or multiple detectors, thus resolving the contradiction between versatility and complexity
2Device complexity
If a single detector is used to generate multiple STEM image types, then the device complexity is reduced, but the measurement precision and image quality may deteriorate
Solution Approach 1:
The patent applies local quality by defining specific integration regions within the detector that are optimized for different image types. Each region is carefully positioned and sized to capture the appropriate signal characteristics for bright-field, annular bright-field, differential phase contrast, or annular dark-field imaging, thereby maintaining measurement precision while using a single detector
Solution Approach 2:
The detector is effectively segmented into multiple functional integration regions that can be independently controlled and optimized. This virtual segmentation allows each region to be tuned for specific image types, preserving measurement precision without requiring physical division into multiple detectors
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the simultaneous generation of multiple STEM image types using a single detector, increasing flexibility and reducing the need for multiple detectors, while allowing for precise control over integration regions for specific analysis purposes.
Implementation Method 1
an electron source for emitting an electron beam
Implementation Method 2
an objective lens for converging the electron beam emitted from the electron source
Implementation Method 3
a scanning deflector for scanning the emitted electron beam over the sample
Implementation Method 4
detecting electrons transmitted through the sample
Data Source
Figure 1
Figure 2~3
Figure 4~5
AI summary
There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.