Step-Grooved Tuning Fork Crystal Plate for Low-Impedance Oscillation
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Solution Overview
Problem
Conventional tuning fork crystal oscillator plates exhibit high impedance, affecting the Q value of piezoelectric devices, leading to reduced frequency precision and increased energy consumption.
Innovation Solution
A tuning fork crystal oscillator plate with step-shaped sinking grooves formed by photolithography and corrosion on both surfaces of the vibrating arms, increasing the polarized electric field area and improving vibration symmetry, which reduces impedance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If conventional groove structures are used in tuning fork vibrating arms, then electrode area is increased and resistance is reduced, but impedance becomes too large and Q value is affected
Solution Approach 1:
The patent transitions from conventional single-level grooves to multi-level step-shaped grooves, adding a vertical dimension to the electrode configuration. This multi-dimensional structure increases the electrode area more effectively while maintaining better symmetry and reducing impedance compared to traditional groove designs.
Solution Approach 2:
The groove structure is segmented into multiple steps rather than being a single continuous groove. This segmentation allows for optimized electrode placement at different levels, increasing the effective electrode area while maintaining symmetry between positive and negative electric fields, thereby reducing impedance.
2Manufacturing precision
If photolithography and corrosion processes are used for miniaturized oscillators, then manufacturing precision is improved, but vibration symmetry deteriorates due to anisotropic corrosion rates
Solution Approach 1:
The patent deliberately designs asymmetric step configurations in the grooves to compensate for the anisotropic corrosion characteristics of quartz. By introducing controlled asymmetry in the groove geometry, the final structure achieves symmetric vibration characteristics despite the directional dependence of the corrosion process.
Solution Approach 2:
Different regions of the vibrating arm are given different groove configurations tailored to local requirements. The step-shaped grooves are strategically positioned and dimensioned to locally compensate for anisotropic corrosion effects, ensuring overall vibration symmetry while maintaining manufacturing precision.
3Volume of moving object
If tuning fork size is reduced for miniaturization, then package size is reduced, but vibration impedance increases and frequency precision deteriorates
Solution Approach 1:
The patent uses multi-level step-shaped grooves to maximize electrode area within the limited volume of miniaturized oscillators. By utilizing the vertical dimension through stepped structures, the electrode area is increased without proportionally increasing the overall oscillator size, thereby maintaining low impedance and high frequency precision in compact packages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The step-shaped sinking grooves enhance frequency precision and reduce energy consumption by minimizing impedance and ensuring bilateral symmetry, resulting in a piezoelectric device with high frequency accuracy and low energy consumption.
Implementation Method 1
A quartz tuning fork crystal resonator is an electronic component that uses the inverse piezoelectric effect of a piezoelectric quartz crystal to generate high-precision oscillation frequency under the drive of an electric field
Implementation Method 2
a size reduction is required. A form in which a groove is formed in a vibrating arm is currently used... Currently, the quartz tuning fork oscillator, which is a core component of miniaturized SMD tuning fork crystal resonators, is processed using photolithography and corrosion processes
Implementation Method 3
processed using photolithography and corrosion processes (an etching process for short)... the corrosion rate of the quartz crystal is different along different axial directions of the quartz crystal in the etching process
Data Source
AI summary
The present invention provides a tuning fork crystal oscillator plate and a manufacturing method therefor, and a piezoelectric device. The tuning fork crystal oscillator plate has a base and a pair of vibrating arms extending out of the base, wherein a front surface and a back surface of each vibrating arm are separately provided with step-shaped sinking grooves formed by photolithography and corrosion along a thickness direction, and the photolithography and corrosion are performed on the step-shaped sinking grooves along a length direction of the vibrating arms; the step-shaped sinking groove is provided with n steps; and outer surfaces of the step-shaped sinking groove are all plated with electrodes. The piezoelectric oscillator plate manufactured by the present invention has the advantages of low impedance, high frequency precision and low energy consumption.