Step-Height Compensation Layer for Display Planarization
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Solution Overview
Problem
Existing display apparatus manufacturing methods face challenges in achieving smooth planarization due to height differences between display and non-display areas, leading to potential defects in the planarization process and product quality.
Innovation Solution
Incorporation of a step-height compensation layer between the substrate and planarization layer in the non-display area, which includes a dummy pattern that compensates for the height difference between the display and non-display areas, allowing for effective chemical mechanical polishing and stable planarization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a planarization layer is applied directly over areas with different thin layer structures, then the manufacturing process is simplified, but the planarization quality deteriorates due to height differences causing defects
Solution Approach 1:
The step-height compensation layer is formed in advance, before the planarization layer is applied. This preliminary action equalizes the surface height in the non-display area, preventing height differences from causing planarization defects while maintaining process simplicity
Solution Approach 2:
The step-height compensation layer acts as an intermediary between the substrate and the planarization layer. It mediates the height difference caused by different thin layer structures in display and non-display areas, enabling smooth planarization without defects
2Adaptability or versatility
If the thin layer structures in display and non-display areas are made different to fulfill functional requirements, then device functionality is improved, but surface height uniformity deteriorates
Solution Approach 1:
The step-height compensation layer is selectively formed only in the non-display area where height compensation is needed. This local application maintains the different functional structures in display and non-display areas while restoring surface height uniformity where required
Solution Approach 2:
The invention addresses the height difference problem by adding a layer in the vertical dimension rather than modifying the horizontal structure. The step-height compensation layer compensates for height differences caused by different thin layer configurations without altering the functional structures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures a stable and defect-free planarization surface, reducing the risk of step-height-related defects and enhancing the overall quality of the display apparatus by leveling the surface between the display and non-display areas.
Implementation Method 1
planarizing a surface of the planarization layer by performing a chemical mechanical polishing process
Data Source
AI summary
A display apparatus and a method of manufacturing a display apparatus, the display apparatus including a first area, the first area including a structure of thin layers on a substrate; a second area, the second area including a structure of thin layers on the substrate; a planarization layer that planarizes the first area and the second area; and a step-height compensation layer, wherein the structure of thin layers of the first area is different from the structure of thin layers of the second area, the step-height compensation layer compensates for a height difference between the first area and the second area due to the different structures of thin layers, and the step-height compensation layer is between the substrate and the planarization layer and in the first area or the second area.