Stepped Channel Probe Card for Oblique Device Testing
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Solution Overview
Problem
Cantilever probe cards face challenges in efficiently testing multiple rows of obliquely-arranged devices without probe collisions due to the unique probe structure and installation space constraints.
Innovation Solution
A probe card design featuring a supporting structure with protrusion portions forming a stepped channel, allowing cantilever probes to protrude and hang from the edges, enabling simultaneous testing of multiple rows of devices while preventing collisions by optimizing the arrangement of probes within the main opening.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If cantilever probes are used to test multiple rows of obliquely-arranged devices, then testing efficiency is improved, but probe collisions occur due to installation space constraints
Solution Approach 1:
The patent introduces a stepped channel structure with multiple height levels to arrange cantilever probes at different vertical positions. This dimensional change allows probes to be staggered in space, enabling testing of multiple rows of obliquely-arranged devices while preventing probe collisions through optimized spatial arrangement.
2Adaptability or versatility
If probes are arranged to test multiple rows of devices, then testing capability is improved, but installation space requirements increase
Solution Approach 1:
The patent employs a nested stepped channel structure where multiple probes are arranged at different height levels within a vertically stacked configuration. This nesting approach allows multiple probes to occupy overlapping horizontal footprints while maintaining vertical separation, thereby increasing testing capability without proportionally increasing installation space.
3Ease of operation
If cantilever probes protrude from the supporting structure, then access to devices is improved, but probe interference increases
Solution Approach 1:
The patent applies local quality by creating stepped channels with different height levels at specific locations within the supporting structure. Each local region is optimized with appropriate probe protrusion lengths and angular orientations, allowing probes to access devices effectively while minimizing interference through localized spatial optimization.
Data Source
AI summary
The present disclosure provides a probe card, and a supporting structure and probe structure thereof. The probe card includes: a substrate, the supporting structure and a probe structure. The supporting structure includes: a main body and a protrusion part. The probe structure includes a plurality of cantilever probes. The main body has a main opening and is disposed on the substrate. The protrusion part is configured to support the cantilever probes, is disposed on the main body and protrude toward to an inner of the main opening for forming a stepped channel in the opening.