Stepped Electroformed Mask Assembly for Precise Display Deposition
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Solution Overview
Problem
Existing mask technologies struggle to achieve high precision in processing open regions, leading to suboptimal deposition quality of functional layers in display panels.
Innovation Solution
A mask assembly with a frame and a mask featuring deposition openings, protrusions, and step formation patterns, manufactured through electroforming, which includes specific angles and materials to enhance precision and reduce thermal deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional mask technologies are used, then manufacturing simplicity is maintained, but manufacturing precision of open regions deteriorates
Solution Approach 1:
The mask body is segmented into multiple functional regions: a flat upper surface for general deposition, inclined inner surfaces for precise patterning control, and protrusions with step formation patterns for defining open regions. This segmentation allows each region to perform its specific function optimally, achieving high precision in open region processing while maintaining overall mask functionality.
Solution Approach 2:
Different regions of the mask are given different geometric properties: the upper surface is flat for uniform deposition, the inner surfaces are inclined at specific angles (30°-70°) for precise pattern transfer, and the protrusions have stepped structures for defining deposition openings. This local differentiation of geometric quality enables high precision patterning in critical areas without unnecessarily complicating the entire mask structure.
2Reliability
If standard materials are used, then ease of manufacture is maintained, but thermal deformation increases
Solution Approach 1:
The mask material parameters are specifically changed to achieve thermal stability. The mask is made from invar alloy with a thermal expansion coefficient of about 6 ppm/°C. or less, and is given a BCC or mixed BCC-FCC crystal structure through controlled manufacturing processes. These parameter changes ensure minimal thermal deformation during deposition operations, improving reliability.
Solution Approach 2:
The mask utilizes invar alloy, which is a composite material consisting primarily of iron and nickel with specific compositions designed to achieve near-zero thermal expansion. This composite material approach provides exceptional thermal stability while maintaining manufacturability through established electroforming techniques.
3Manufacturing precision
If simple mask structure is used, then device complexity is reduced, but deposition quality deteriorates
Solution Approach 1:
The mask design incorporates three-dimensional protrusions with stepped structures that extend vertically from the mask body. These protrusions create multiple levels (steps) that precisely define the boundaries of deposition openings. By utilizing the vertical dimension, the mask achieves high precision patterning capability without requiring complex two-dimensional patterns, thus improving deposition quality while controlling overall structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves the deposition quality of functional layers on display panels by minimizing defects and ensuring precise patterning, thereby enhancing the overall performance of the display devices.
Implementation Method 1
The mask may be formed by electroforming
Implementation Method 2
primarily growing a plating film on the support substrate by a first electroforming process to form a primarily grown plating film
Data Source
AI summary
A mask assembly includes a frame including a frame opening, and a mask disposed on the frame. The mask includes a body portion including an upper surface and a lower surface opposing each other and deposition openings spaced apart from each other, protrusions protruding from the upper surface and surrounding the corresponding deposition openings, and at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.