Stepped Mount Structure for Precise Vibration Element Positioning
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Solution Overview
Problem
Existing vibration devices face challenges in miniaturization and profile reduction due to the inability to precisely position the vibration element in the height direction, leading to variations in clearance between contact portions and changes in the tilt of the vibration element relative to the substrate.
Innovation Solution
A vibration device with a substrate, a mount having first and second protrusions with different heights, and an adhesive fixing the vibration element to these protrusions, allowing precise positioning and stabilization of the vibration element, preventing changes in tilt even when the element shifts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the vibration element is fixed using a conventional electrode with a step structure, then the gap between the tip end portion and substrate can be secured, but the profile cannot be reduced due to inability to precisely position the vibration element in the height direction
Solution Approach 1:
The electrode is divided into multiple segments (first electrode portion, second electrode portion, third electrode portion) with different heights, forming a stepped structure. This segmentation allows the vibration element to be positioned at a precise height while reducing the overall profile of the device by eliminating the need for a separate positioning structure.
Solution Approach 2:
The invention transitions from a single-plane electrode structure to a multi-level three-dimensional electrode structure. By utilizing the height dimension to create stepped electrode portions, the system achieves precise positioning of the vibration element while reducing the horizontal footprint and overall profile of the device.
2Reliability
If the position of the vibration element shifts relative to the electrode, then the clearance between contact portions varies, but the tilt of the vibration element changes, preventing precise positioning in the height direction
Solution Approach 1:
The stepped electrode structure is designed in advance to compensate for potential position shifts of the vibration element. The different heights of the electrode portions create a self-aligning effect that prevents tilt changes even when the vibration element shifts horizontally, thereby maintaining positioning precision and reliability.
Solution Approach 2:
The electrode is pre-configured with a specific stepped geometry that establishes the correct tilt angle and height position of the vibration element before any potential shifts occur. This preliminary structural arrangement ensures that the vibration element maintains its precise positioning and stable tilt angle throughout operation.
Data Source
AI summary
A vibration device has a substrate, a mount disposed on the substrate, a vibration element having a base end and a tip end, the base end being disposed on the mount, and an adhesive fixing the mount and the vibration element. The mount has a first protrusion and a second protrusion disposed to be aligned in a first direction in which the base end and the tip end are aligned, and whose protrusion heights on the vibration element side differ from each other, the second protrusion is located on the base end side of the vibration element relative to the first protrusion, the vibration element is disposed on the first protrusion and the second protrusion, and a portion of the vibration element on the base end side relative to the second protrusion is separated from the substrate and the mount.


