Stepped High-Power Pulse Generator for Capacitive Plasma Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high power with high voltage and/or high current to capacitive loads, particularly in plasma processes, due to voltage handling limitations of semiconductor switches, especially during high frequency operations.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, electrically connected to achieve a higher output value, and controlled by a unit to generate step-function pulses without continuous slope, allowing for efficient voltage and current delivery with reduced overshoots and power losses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and high current pulses, then the power delivery capability is improved, but the voltage handling capability of semiconductor switches deteriorates
Solution Approach 1:
The patent divides a single high-power generator into multiple low-power generators, each operating within safe voltage limits. The generators are connected in series through a coupling mechanism, allowing their voltages to add up to achieve the required high output voltage while each individual generator remains within the safe operating range of semiconductor switches.
2Reliability
If multiple low-power generators are connected in series to achieve high voltage, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
The patent designs each low-power generator module with identical circuit topology and components, making them universal and interchangeable. This modular approach simplifies the overall system design, as each module can be independently designed, tested, and replaced without affecting other modules, thereby reducing the complexity burden despite having multiple units.
Solution Approach 2:
The patent introduces a coupling mechanism that serves as an intermediary between multiple low-power generators. This coupling unit coordinates the series connection of generators, manages the switching synchronization, and ensures proper voltage addition, thereby simplifying the control complexity of managing multiple generators.
3Stability of the object's composition
If voltage pulses are delivered with continuous slope, then the smoothness of voltage transition is improved, but voltage overshoots and power losses increase
Solution Approach 1:
The patent employs periodic switching of capacitor connections in discrete steps rather than continuous adjustment. The capacitors are switched in and out of the circuit at specific time intervals during the pulse duration, creating a stepped voltage profile that avoids continuous slope-related losses while maintaining effective plasma coupling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and reliable delivery of high power pulses with sharp voltage transitions, effectively addressing the limitations of existing generators by using a combination of low-power generators and advanced control units to manage energy distribution and reduce power losses.
Implementation Method 1
each LP-generator comprising an energy storage component, wherein in use the energy storage component is charged to a predefined value related to the energy storage component
Data Source
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AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - the control unit (22) is further configured to select the contribution of LP-generators (14, 16, 18) in a way to reduce voltage overshoots at the output of the HP-generator (10) and/or at a dedicated location on the load, in particular at the substrate of a plasma process.