Stepper Motor Bellows Valve for Wide-Range Vacuum Pressure Control

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Solution Overview

Problem

Current vacuum systems lack precision, scalability, and cost-effectiveness due to the use of multiple, unique valves that operate in limited pressure ranges and directions, leading to high failure rates, increased costs, and reduced accuracy.

Innovation Solution

A stepper motor proportional bellows valve system that combines a translationally driven linear stepper motor with a bellows valve, allowing for variable orifice size control through profile washers, enabling wide-range pressure control from 1000 Torr to 0.010 Torr and simultaneous venting and evacuation of chambers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple unique valves are used to control different pressure ranges, then pressure control capability is improved, but device complexity and cost increase

Engineering Contradiction:
Improvepressure control capabilityVSAvoidnumber of valves
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies universality by designing a single valve that can control multiple pressure ranges (rough vacuum from 1000 Torr to 1 Torr and high vacuum from 1 Torr to 0.010 Torr) through interchangeable bellows assemblies, eliminating the need for multiple separate valves and reducing system complexity while maintaining broad pressure control capability

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent applies dynamics by making the bellows assembly interchangeable and adaptable, allowing the valve to dynamically adjust its characteristics by swapping bellows components to match different pressure range requirements, thereby providing versatile pressure control with a single valve unit

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If manual bellows valves are used, then fine control and low leak rate are achieved, but automation is lost

Engineering Contradiction:
Improvefine control precisionVSAvoidautomatic control
Core Design Contradiction:
Manufacturing precisionVSExtent of automation

Solution Approach 1:

The patent applies mechanics substitution by replacing the manual mechanical operation of bellows valves with an automated stepper motor-driven plunger mechanism that translates rotational motion to linear motion, thereby achieving automatic control while preserving the fine control precision and low leak rate characteristics of bellows valves

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Extent of automation

If solenoid open/close valves are used, then automation is achieved, but control precision and reliability decrease

Engineering Contradiction:
Improveautomatic operationVSAvoidfailure rate
Core Design Contradiction:
Extent of automationVSReliability

Solution Approach 1:

The patent applies mechanics substitution by replacing the solenoid actuation mechanism with a stepper motor-driven plunger system that provides proportional control through precise rotational-to-linear motion conversion, thereby achieving both automation and improved reliability through better control precision and reduced failure rates

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Ease of operation

If rapid oscillation is used to regulate pressure, then pressure regulation is achieved, but accuracy and component lifespan decrease

Engineering Contradiction:
Improvepressure regulationVSAvoidaccuracy and lifecycle
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent applies continuity of useful action by using a stepper motor-driven plunger that provides continuous proportional control of the valve opening rather than rapid oscillation between open and closed states, thereby maintaining accurate pressure regulation while reducing mechanical stress and extending component lifespan

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system provides precise, automatic, and economical control of pressure across a wide range, reducing process times, wear on pumps, and waste, while allowing the use of reliable medium vacuum pumps in rough vacuum applications, thus increasing efficiency and safety.

Implementation Method 1

a rotational motion of the motor lead screw is converted into a linear motion of the plunger adapter and the bellows

Methodology Applied
Scientific EffectScrew mechanism: Screw

Implementation Method 2

the bellows is connected to the plunger adapter, such that the plunger adapter is configured to translate rotational motion of the stepper motor into linear motion of the bellows, such that the bellows is configured to compress and expand based on rotational motion of the stepper motor

Methodology Applied
Scientific EffectBellows expansion and contraction: Elasticity

Data Source

PatentUS11668409B2Stepper motor proportional control bellows valve
Publication Date: 2023.06.06 DIGIVAC CO
  • US11668409B2 patent drawing
  • US11668409B2 patent drawing
  • US11668409B2 patent drawing

AI summary

A stepper motor proportionally controlled bellows valve system comprising: a valve manifold; one or more stepper motors; and one or more bellows valves. The one or more bellows valves may comprise a bellows, a sealing washer, and a profile washer. The sealing washer is configured to removeably engage with a vacuum orifice rim. The profile washers are configured to stick into the valve orifice, such that the profile washer defines a flow through the valve.