Stirling Cold Trap Vibration Control for Vacuum Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing GM refrigerators are difficult to downsize due to their configuration, leading to vibration issues that can cause resonance with vacuum vessels, displacing substrates during vacuum processing.
Innovation Solution
A refrigerator with a vibration reduction mechanism, including a dynamic vibration absorber and a frequency adjustment device, is used to minimize vibrations in a Stirling refrigerator with a cylinder structure, allowing for effective cooling while attached to a vacuum device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a GM refrigerator is used to cool the cold panel, then the cooling capability is sufficient, but the device size cannot be reduced and vibration problems occur
Solution Approach 1:
The patent replaces the conventional GM refrigerator's mechanical compression system with a Stirling refrigerator that uses a linear motor to drive piston reciprocating motion. This substitution eliminates the need for a traditional compressor and associated mechanical components, enabling significant size reduction while maintaining cooling capability. The linear motor-driven piston system achieves isothermal compression and expansion through controlled reciprocating motion, providing the necessary cooling function in a compact form factor.
Solution Approach 2:
The patent replaces the GM refrigerator's vibration-prone mechanical compression system with a Stirling refrigerator using a linear motor. This substitution eliminates the harmful vibrations associated with conventional compressors while maintaining reliable cooling performance. The linear motor provides smooth, controlled piston motion that avoids the mechanical vibrations and resonance problems inherent in traditional GM refrigerator designs.
2Productivity
If the piston and displacer are moved synchronously to form a reversible cycle, then cooling efficiency is improved, but vibration occurs that can resonate with vacuum vessels
Solution Approach 1:
The patent employs dynamic control of the piston and displacer motion through a linear motor system. The driving frequency adjustment means dynamically modifies the operating frequency to optimize cooling efficiency while avoiding resonance frequencies of the vacuum vessel. This dynamic approach allows the system to adapt its operating parameters in real-time, maintaining high cooling efficiency while minimizing harmful vibrations through frequency modulation and avoidance of resonant conditions.
Solution Approach 2:
The patent changes the driving frequency parameter of the piston to reduce vibration and avoid resonance with the vacuum vessel. The driving frequency adjustment means modifies the operating frequency within an optimal range, transforming the system's dynamic characteristics to eliminate harmful vibrations while preserving cooling efficiency. This parameter adjustment allows the system to operate at frequencies that maximize performance while minimizing adverse vibrational effects.
3Volume of moving object
If a compact refrigerator is used to reduce footprint, then space requirements are met, but vibration reduction becomes more challenging
Solution Approach 1:
The patent replaces the vibration-generating mechanical compression system with a linear motor-driven piston system in a compact Stirling refrigerator. This substitution eliminates the need for traditional compressors and valve mechanisms that generate harmful vibrations, achieving both compactness and vibration reduction simultaneously. The linear motor provides direct, smooth motion control that inherently minimizes mechanical vibrations while maintaining the compact form factor required for reduced footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces vibrations in the refrigerator and cold trap, preventing substrate displacement and enhancing the stability of vacuum processing equipment.
Implementation Method 1
a piston capable of reciprocally moving in the case so as to compress and expand a working medium
Implementation Method 2
heat absorption by the heat absorption portion and heat dissipation by the heat dissipation portion are performed
Implementation Method 3
heat absorption by the heat absorption portion and heat dissipation by the heat dissipation portion are performed
Implementation Method 4
vibration reduction means for reducing a vibration of the case when the piston is driven
Implementation Method 5
When the vibration of the Stirling refrigerator is transmitted to the vacuum vessel, resonance with a transporter in the vacuum vessel may occur
Data Source
AI summary
This invention provides a cold trap using a Stirling refrigerator. A refrigerator includes a drive piston configured to drive a free piston so as to reciprocally move a working medium between a heat dissipation portion and a heat absorption portion, a vibration sensor configured to measure a vibration of a case, a dynamic vibration absorber configured to reduce the vibration of the case when the drive piston is driven, and a frequency adjustment device configured to adjust a driving frequency to reduce the vibration of the case when the drive piston is driven in a state in which the case is connected to a vacuum device.