Stirring Paddle Drive Mechanism for Low-Load Wet Processing
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Solution Overview
Problem
Existing electroplating devices face high load on driving mechanisms due to increased stirring speeds, leading to reduced lifespan and increased maintenance time, particularly in the crank mechanism, which requires frequent greasing.
Innovation Solution
A wet substrate processing device with a driving mechanism that includes a rotary motor, central rotating member, planetary member, and a driving shaft connected to a stirring paddle, utilizing a non-contact air bearing for reduced friction and an automatic grease feeder for timely lubrication, allowing the paddle to reciprocate within the plating solution without the need for a crank mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the stirring speed of the paddle is increased to supply sufficient ions uniformly, then the in-plane uniformity of film thickness is improved, but the load on the driving mechanism increases and its lifespan is shortened
Solution Approach 1:
The patent replaces the traditional crank mechanism with a magnetic coupling system. A motor-driven magnet rotates inside a sealed chamber, inducing rotational motion in a magnetically coupled paddle shaft through magnetic field interaction without mechanical contact. This eliminates mechanical wear and friction in the transmission mechanism, allowing high-speed stirring while preserving driving mechanism reliability and extending its lifespan.
2Manufacturing precision
If the stirring speed of the paddle is increased to supply sufficient ions uniformly, then the in-plane uniformity of film thickness is improved, but the maintenance time increases due to frequent greasing of the crank mechanism
Solution Approach 1:
The magnetic coupling system replaces mechanical contact-based transmission with non-contact magnetic field interaction. The motor-driven magnet rotates inside a sealed chamber, inducing rotational motion in the paddle shaft through magnetic coupling without physical contact. This eliminates the need for lubrication and frequent maintenance, reducing maintenance time while enabling high-speed stirring for uniform film thickness.
3Ease of operation
If a crank mechanism is used to convert rotational motion to linear reciprocating motion, then the paddle can stir the plating solution effectively, but the device complexity and maintenance requirements increase
Solution Approach 1:
The patent replaces the complex crank mechanism with a simplified magnetic coupling system. A motor-driven magnet rotates inside a sealed chamber, and through magnetic field interaction, directly induces rotational motion in the paddle shaft. This eliminates intermediate mechanical components such as connecting rods, crank arms, and bearings, reducing device complexity while maintaining effective stirring action.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the load on the driving mechanism, prolongs its lifespan, and minimizes maintenance time by automatically supplying grease, ensuring continuous operation with reduced friction and wear.
Implementation Method 1
utilizing a non-contact air bearing for reduced friction
Implementation Method 2
a planetary member connected to the central rotating member so as to rotate inside the outer fixed ring; and a driving shaft connected to the planetary member and the stirring paddle
Data Source
AI summary
Provided is a stirring paddle driving mechanism with a small load. According to one embodiment, a wet substrate processing device is provided, having: a treatment tank for holding a treatment solution; a stirring paddle disposed inside the treatment tank; and a driving mechanism for driving the stirring paddle, wherein the driving mechanism has: a rotary motor; a central rotating member connected to the rotary motor; an outer fixed ring spaced from the central rotating member and surrounding an outside of the central rotating member; a planetary member connected to the central rotating member so as to rotate inside the outer fixed ring; and a driving shaft connected to the planetary member and the stirring paddle and extending in a radial direction of the outer fixed ring, wherein the driving shaft is configured to reciprocate in a longitudinal direction by rotation of the rotary motor.