Storage Container Surface Treatment for Liquid Composition Moisture Control
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Solution Overview
Problem
The miniaturization of semiconductor device circuits leads to pattern collapse during cleaning or rinsing due to differences in capillary force caused by varying heights of residual liquid, resulting in reduced yield, and existing solutions like water-repellent protective films are ineffective due to storage conditions affecting their performance.
Innovation Solution
A storage container with an inner wall contact angle of 10 to 150 degrees and a moisture concentration of 400 ppm or less, using a silane compound or silylating agent, and a non-aqueous organic solvent with low water content to maintain the water-repellent performance of the liquid composition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a water-repellent protective film is formed on the substrate surface to reduce capillary force and suppress pattern collapse, then pattern collapse is suppressed, but the water repellent performance deteriorates depending on storage conditions of the treatment liquid
Solution Approach 1:
The storage container inner wall is pre-treated with a surface treatment agent to create a specific surface property (contact angle of 10-150 degrees) before the treatment liquid is stored. This preliminary action prevents moisture absorption from occurring during storage, thereby maintaining the stability of the treatment liquid's water repellent performance while enabling pattern collapse suppression when the liquid is applied.
Solution Approach 2:
The storage container inner wall acts as an intermediary between the treatment liquid and the external environment (moisture). By controlling the inner wall's surface properties, it mediates the interaction to prevent moisture from entering the liquid, thus protecting the liquid's performance stability while still allowing the liquid to function as intended for pattern collapse suppression.
2Stability of the object's composition
If the storage container inner wall is made hydrophobic to prevent moisture absorption, then water repellent performance is maintained, but the contact angle becomes too high (>150 degrees) which may affect liquid retention
Solution Approach 1:
The contact angle of the storage container inner wall is precisely controlled within the range of 10-150 degrees through surface treatment. This parameter optimization ensures the inner wall is sufficiently hydrophobic to prevent moisture absorption (maintaining water repellent performance) while not being so hydrophobic as to cause liquid retention problems, achieving a balanced state that satisfies both requirements.
3Ease of manufacture
If the treatment liquid is stored in a conventional container, then storage is simple, but moisture is absorbed from the air causing deterioration of surface modification performance
Solution Approach 1:
The storage container inner wall is treated to create a hydrophobic environment that repels moisture from the air. This creates an inert-like atmosphere within the container that prevents moisture absorption by the treatment liquid, thereby maintaining surface modification performance while keeping the storage system relatively simple without requiring complex sealing or nitrogen filling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The storage container effectively suppresses the deterioration of surface modification performance and maintains excellent recyclability by minimizing moisture absorption and retention, preventing pattern collapse and ensuring consistent water-repellent properties.
Implementation Method 1
at least a portion, which is in contact with the liquid composition, of an inner wall of the storage portion has a contact angle θ with respect to water of 10 degrees or more and 150 degrees or less
Implementation Method 2
reducing the surface tension of a liquid acting on a pattern at the time of cleaning or rinsing of a substrate by forming a water-repellent protective film on the substrate surface
Implementation Method 3
caused by a difference in height of the residual liquid between a portion having a high aspect ratio of the pattern and a portion having a low aspect ratio of the pattern, thereby causing a difference in the capillary force acting on the pattern
Data Source
AI summary
The storage container according to the embodiment of the present invention includes a storage portion storing a liquid composition containing an organic solvent having a moisture concentration of 400 ppm by mass or less and a surface treatment agent. At least a portion, which is in contact with the liquid composition, of an inner wall of the storage portion has a contact angle θ with respect to water of 10 degrees or more and 150 degrees or less.